Dry processes are the state of the art technologies leading the way through ultra-high performance in microelectronic devices. The DPS provides for 26 years a valuable forum of discussions on science and technology of new developments in this field. Present 27th symposium is for the first time jointly organized with Korean colleagues in Jeju and a special issue of Thin Solid Films will be published besides the Extended Abstracts. The DPS Organizing Committee invites you to the conference and welcomes the submission of your papers. 

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Detailed information on the post conference proceedings "Thin
Solid Films" is uploaded.

Scientific program is uploaded.