| Sponsored by |
 The Institute of Electrical Engineers of Japan |
| Co-sponsored by |
| The Japan Society of Applied Physics |
| In Conjunction with |
| The Institute of Electronics, Information and Communication Engineers
of Japan |
| The Electrochemical Society of Japan |
| Electochemical Society Japan Chapter |
| Korea Science and Engineering Foundation |
| The 21st Century COE Program "Plasma-Nano"(Nagoya Uinv., Japan) |
| Center for Advanced Plasma Surface Technology (Sungyunkwan Univ., Korea) |
|
| Applied Materials Korea |
| Jusung Engineering Co., Ltd. |
| Lam Research Korea |
| New Power Plasma Co., Ltd. |
| Novellus Korea Co., Ltd. |
| Plasmart |
| Samsung Electronics |
| TEL Korea |
|
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