Dry processes are the state of the art technologies leading the way through ultra-high performance in
microelectronic devices. The DPS provides for 27 years a valuable forum of discussions on science and
technology of new developments in this field. Present 28th symposium is to be held in Nagoya, Japan,
again in conjunction with Korean organizations as the last symposium. A special issue of "Thin Solid Films"
will be published besides the Extended Abstracts.
The DPS Organizing Committee invites you to the conference and welcomes the submission of your papers.
The DPS Organizing Committee invites you to the conference and welcomes the submission of your papers.