SiO2Etching をテンプレートにして作成

開始行:
[[Memorandum]] #katex *Surface Reactions During Silicon Oxide Etching Using Flu... Kenji Ishikawa **Abstract Fabrication of ultra-large-scale integrated (ULSI) circui... Fluorocarbon gas plasmas are used as standard gas chemist... SiOs +CFx(g) → SiOCFs +M+(g) → COx ↑ +SiFx ↑ +M, where s and g stand for surface and gas species, and M&su... To clarify the reaction mechanism, the author focuses on ... First, IR spectra are consisted of a summation of optical... Next, to control the performance of the plasma etching pr... The chemistry associated with fluorocarbon plasmas is com... To realize this requirement, the author combines in-situ ... In the background, several models have been proposed to e... The relationship between the axial profiles of the densit... Reactive species such as ions impinging on the surface ac... Previous beam studies showed that early-stage surface mod... The author investigated surface of SiO&sub(2); film after... Finally, the author developed an '''in vacuo''' electron-... In summary, the author have investigated the chemical rea... Above mentioned, the author could clarify chemo-physicall... ----

終了行:
[[Memorandum]] #katex *Surface Reactions During Silicon Oxide Etching Using Flu... Kenji Ishikawa **Abstract Fabrication of ultra-large-scale integrated (ULSI) circui... Fluorocarbon gas plasmas are used as standard gas chemist... SiOs +CFx(g) → SiOCFs +M+(g) → COx ↑ +SiFx ↑ +M, where s and g stand for surface and gas species, and M&su... To clarify the reaction mechanism, the author focuses on ... First, IR spectra are consisted of a summation of optical... Next, to control the performance of the plasma etching pr... The chemistry associated with fluorocarbon plasmas is com... To realize this requirement, the author combines in-situ ... In the background, several models have been proposed to e... The relationship between the axial profiles of the densit... Reactive species such as ions impinging on the surface ac... Previous beam studies showed that early-stage surface mod... The author investigated surface of SiO&sub(2); film after... Finally, the author developed an '''in vacuo''' electron-... In summary, the author have investigated the chemical rea... Above mentioned, the author could clarify chemo-physicall... ----

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