SiO2Etching81 をテンプレートにして作成

開始行:
[[SiO2Etch]] *Introduction The surface reaction model of SiO2 etching with fluorocar... The Langmuir adsorption model has been introduced in whic... Next, it has been explained that the etching rate is inve... With an effective bias applied to the substrate, the syst... From above, the following questions has been required to ... 1. Is the Langmuir model appropriate for adsorption of ad... 2. The deposition mechanism of the a-C;F films 3. What the rate limiting step for determination of the e... 4. Is the effects of the impact ion energy, It has been hoped that these points would be resolved fir... ** Outline of this study The development of semiconductor device manufacturing has... The current status of the manufacturing process and its p... Due to technical difficulties, in-situ observation of the... The analyzed results of etching reactions of silicon oxid... Next, using a device capable of delivering a mass-separat... The author describes the results of in situ observations ... Finally, I will summarize and discuss the future prospects.

終了行:
[[SiO2Etch]] *Introduction The surface reaction model of SiO2 etching with fluorocar... The Langmuir adsorption model has been introduced in whic... Next, it has been explained that the etching rate is inve... With an effective bias applied to the substrate, the syst... From above, the following questions has been required to ... 1. Is the Langmuir model appropriate for adsorption of ad... 2. The deposition mechanism of the a-C;F films 3. What the rate limiting step for determination of the e... 4. Is the effects of the impact ion energy, It has been hoped that these points would be resolved fir... ** Outline of this study The development of semiconductor device manufacturing has... The current status of the manufacturing process and its p... Due to technical difficulties, in-situ observation of the... The analyzed results of etching reactions of silicon oxid... Next, using a device capable of delivering a mass-separat... The author describes the results of in situ observations ... Finally, I will summarize and discuss the future prospects.

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