Reviews1 のバックアップソース(No.1)

#author("2020-11-20T22:19:19+09:00","default:ishikawa","ishikawa")
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This is a list of review articles

[2020]

-[209] Electron spin resonance as a tool to monitor the influence of novel processing technologies on food properties
--Trends in Food Science and Technology 100, pp. 77-87 (April 17, 2020) [[DOI:https://doi.org/10.1016/j.tifs.2020.03.032]]
---Francisco J. Barba, Shahin Roohinejad, ''Kenji Ishikawa'', Sze Ying Leong, Alaa El-Din A Bekhit, Jorge A. Saraiva, and Nikolai Lebovka

[2019]

-[202] Review of methods for the mitigation of plasma-induced damage to low-dielectric-constant interlayer dielectrics used for semiconductor logic device interconnects
--Plasma Processes and Polymers 16 (9), 1900039 (pp. 1-20) (September 5, 2019). [[DOI:https://doi.org/10.1002/ppap.201900039]]
---Hideshi Miyajima, ''Kenji Ishikawa'', Makoto Sekine, and Masaru Hori

-[195] &color(white,red){Free}; Progress and perspectives in dry processes for leading-edge manufacturing of devices: Toward intelligent processes and virtual product development
--Japanese Journal of Applied Physics 58 (SE), SE0804 (pp. 1-21) (May 30, 2019) [[DOI:https://doi.org/10.7567/1347-4065/ab163b]]
//---Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, and ''Kenji Ishikawa''

-[194] &color(white,red){Free}; Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?
--Japanese Journal of Applied Physics 58 (SE), SE0803 (pp. 1-17) (May 30, 2019) [[DOI:https://doi.org/10.7567/1347-4065/ab163a]]
//---Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, and ''Kenji Ishikawa''

-[193] &color(white,red){Free}; Progress and perspectives in dry processes for nanoscale feature fabrication: Fine pattern transfer and high-aspect-ratio feature formation
--Japanese Journal of Applied Physics 58 (SE), SE0802 (pp. 1-24) (May 30, 2019) [[DOI:https://doi.org/10.7567/1347-4065/ab1638]]
//---Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, and ''Kenji Ishikawa''

-[192] &color(white,red){Free}; Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: A physics and chemistry perspective
--Japanese Journal of Applied Physics 58 (SE), SE0801 (pp. 1-14) (May 30, 2019) [[DOI:https://doi.org/10.7567/1347-4065/ab163e]]
//---''Kenji Ishikawa'', Tatsuo Ishijima, Tatsuru Shirafuji, Silvia Armini, Emilie Despiau-Pujo, Richard A. Gottscho, Keren J. Kanarik, Gert J. Leusink, Nathan Marchack, Takahide Murayama, Yasuhiro Morikawa, Gottlieb S. Oehrlein, Sangwuk Park, Hisataka Hayashi, and Keizo Kinoshita

[2018]

-[161] &color(white,red){Free}; &color(white,blue){Etch}; Progress in nanoscale dry processes for fabrication of high-aspect-ratio features: How can we control critical dimension uniformity at the bottom?
--Japanese Journal of Applied Physics 57 (6S2), 06JA01(May 25, 2018). [[DOI:https://doi.org/10.7567/JJAP.57.06JA01]]
---''Kenji Ishikawa'', Kazuhiro Karahashi, Tatsuo Ishijima, Sung Il Cho, Simon Elliott, Dennis Hausmann, Dan Mocuta, Aaron Wilson, and Keizo Kinoshita

[2017]

-[J5] &color(white,red){Free}; 最先端プラズマバイオ技術
--Japanese Society of Radiation Chemistry 104, 3-14 (October 31, 2017) 放射線化学 (in Japanese) [[web:http://www.radiation-chemistry.org/kaishi.html]]
---Masaru Hori, ''Kenji Ishikawa'', Takashi Kondo, Hiromasa Tanaka, and Hiroshi Hashizume

-[133] &color(white,brown){PM}; State of the art in medical applications using non-thermal atmospheric pressure plasma
--Reviews on Modern Plasma Physics 1, 3 (July 3, 2017). [[DOI:https://doi.org/10.1007/s41614-017-0004-3]]
---Hiromasa Tanaka, ''Kenji Ishikawa'', Masaaki Mizuno, Shinya Toyokuni, Hiroaki Kajiyama, Fumitaka Kikkawa, Hans-Robert Metelmann, and Masaru Hori

-[J4] &color(white,red){Free}; &color(white,red){ESR}; &color(white,brown){PM}; 電子スピン共鳴法を活用したプラズマバイオ反応プロセスの診断
--プラズマ核融合学会誌 2017年5月号　小特集「気相－液相反応プロセスにおける診断技術の進展」 [[PDF:https://www.jspf.or.jp/Journal/PDF_JSPF/jspf2017_05/jspf2017_05-246.pdf]]
---''石川健治''，近藤隆，竹田圭吾，呉準席，橋爪博司，田中宏昌，近藤博基，太田貴之，伊藤昌文，関根誠，堀勝

-[130] &color(white,blue){Etch}; Progress and prospects in nanoscale dry processes - How can we control atomic layer reactions?
--Japanese Journal of Applied Physics 56 (6S2), 06HA02  (June 1, 2017). Progress Review of DPS special issue. [[DOI:https://doi.org/10.7567/JJAP.56.06HA02]] 
---''Kenji Ishikawa'', Kazuhiro Karahashi, Takanori Ichiki, Jane P. Chang, Steven M. George, W. M. M. Kessels, Hae June Lee, Stefen Tinck, Jung Hwan Um, and Keizo Kinoshita

[2014]

-[P11] &color(white,red){ESR}; &color(white,brown){PA}; Diagnostics of plasma-biological surface interactions in low pressure and atmospheric pressure plasmas
--International Journal of Modern Physics: Conference Series 32, 1460318 (August 15, 2014).  [[DOI:https://doi.org/10.1142/S2010194514603184]], [[link to World Scientific Publishing Co.:http://www.worldscientific.com/doi/abs/10.1142/S2010194514603184]]
---''Kenji Ishikawa'', and Masaru Hori

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