ProceedingIntern12 をテンプレートにして作成

開始行:
#include(MenuTab1,notitle) 2012年の国際会議リスト -176) Takuya Takeuchi, Shinpei Amasaki, Keigo Takeda, Hir... --(Best poster award) Modification of ArF photoresist cau... ---The 14th International Workshop on Advanced Plasma Pro... -177) Yusuke Kondo, Yudai Miyawaki, Keigo Takeda, Hiroki ... --Mechanism of generating ions and radicals in C3F6O plas... ---The 14th International Workshop on Advanced Plasma Pro... -178) Keigo Takeda, Atsushi Fukushima, Yusuke Abe, Hiroki... --Surface loss probability of hydrogen radical on silicon... ---8th EU-Japan Joint Symposium on Plasma Processing (JSP... -179) Masaru Hori, Makoto Sekine, Hiroki Kondo, ''Kenji I... --(INVITED) Advanced plasma nano science and technology f... ---iPlasmaNano-III, (Nanyang Executive Centere, Singapore... -180) Makoto Sekine, Toshiya Suzuki, Keigo Takeda, Hiroki... --(INVITED) Formation of 10-nm organic pillars by plasma ... ---iPlasmaNano-III, (Nanyang Executive Centere, Singapore... -181) Atsushi Fukushima, Yusuke Abe, Keigo Takeda, Hiroki... --Relationship between silicon thin film property and flu... ---4th International Symposium on Advance Plasma Science ... -182) Hiroshi Hashizume, Takayuki Ohta, T. Mori, Masafumi... --Effect of atomic oxygen on inactivation of spores of P.... ---4th International Symposium on Advance Plasma Science ... -183) Shang Chen, Yi Lu, Ryosuke Kometani, ''Kenji Ishika... --The role of hydrogen radical on plasma damaged gallium ... ---4th International Symposium on Advance Plasma Science ... -184) Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, ''Kenji... --Field emission properties of 10-nm organic nanopillars ... ---4th International Symposium on Advance Plasma Science ... -185) Tatsuya Hagino, Hiroyuki Kano, ''Kenji Ishikawa'', ... --Effect of electrode materials on synthesis of nano-grap... ---4th International Symposium on Advance Plasma Science ... -186) Takehiro Hiraoka, Noboru Ebizuka, Keigo Takeda, Tak... --Terahertz time-domain spectroscopy for Penicillium digi... ---4th International Symposium on Advance Plasma Science ... -187) ''Kenji Ishikawa'', Sachiko Iseki, Hiroshi Hashizum... --Real time electron spin resonance observation of Penici... ---4th International Symposium on Advance Plasma Science ... -188) Yusuke Abe, Atsushi Fukushima, Keigo Takeda, ''Kenj... --Loss kinetics of hydrogen radicals in silane plasma. ---4th International Symposium on Advance Plasma Science ... -189) Naoya Sumi, ''Kenji Ishikawa'', Hideo Horibe, Akihi... --Analysis of surface reactions mechanism on organic mate... ---4th International Symposium on Advance Plasma Science ... -190) Masanori Kato, Keigo Takeda, ''Kenji Ishikawa'', Hi... --Three dimensional investigation of activated species in... ---4th International Symposium on Advance Plasma Science ... -191) Yusuke Kondo, Yudai Miyawaki, Keigo Takeda, Hiroki ... --Mechanism of generating ions and radicals in C3F6O plas... ---4th International Symposium on Advance Plasma Science ... -192) Ryosuke Kometani, Shang Chen, Yi Lu, Cao David, ''K... --Interactions with plasmas on gallium nitride at high te... ---4th International Symposium on Advance Plasma Science ... -193) Yi Lu, Shang Chen, Ryosuke Kometani, ''Kenji Ishika... --Depth profiles on stoichiometry of plasma-etched GaN. ---4th International Symposium on Advance Plasma Science ... -194) Tatsuya Komuro, Keigo Takeda, ''Kenji Ishikawa'', M... --Effect of DC-bias superposed to the upper electrode of ... ---4th International Symposium on Advance Plasma Science ... -195) Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki ... --Clarification of highly selective SiO2 etching process ... ---4th International Symposium on Advance Plasma Science ... -196) Kohei Asano, Hiroshi Yamamoto, Yudai Miyawaki, Keig... --Formation of smooth surface on 193 nm photoresist by C5... ---4th International Symposium on Advance Plasma Science ... -197) Takuya Takeuchi, Shinpei Amasaki, Keigo Takeda, ''K... --In situ XPS anaysis of ArF photoresist surface modified... ---4th International Symposium on Advance Plasma Science ... -198) Ya Lu, Atsushi Fukushima, Yusuke Abe, Keigo Takeda,... --Effect of hydrogen radical injection on plasma enhanced... ---4th International Symposium on Advance Plasma Science ... -199) Leoyung. Yu, Jun Kuki, Hiroki Kondo, ''Kenji Ishika... --Crystallographic analysis of amorphous carbon films syn... ---4th International Symposium on Advance Plasma Science ... -200) Jun Kuki, Leoyung Yu, Hiroki Kondo, ''Kenji Ishikaw... --Effects of RF bias on optical properties of amorphous c... ---4th International Symposium on Advance Plasma Science ... -201) Hironao Shimoeda, Hiroki Kondo, ''Kenji Ishikawa'',... --Evaluation of crystallographic properties of carbon nan... ---4th International Symposium on Advance Plasma Science ... -202) Tsuyoshi Horibe, S. Mitsuguchi, Hiroyuki Kano, Hiro... --Formation and characteristics of TiO2 nanoparticles-sup... ---4th International Symposium on Advance Plasma Science ... -203) H. Cho, Hiroki Kondo, ''Kenji Ishikawa'', Makoto Se... --Electrical properties and crystalline structures of car... ---4th International Symposium on Advance Plasma Science ... -204) Shinpei Amasaki, Takuya Takeuchi, Keigo Takeda, ''K... --Investigation of reaction mechanism at sidewall of thro... ---4th International Symposium on Advance Plasma Science ... -205) Shang Chen, Yi Lu, Ryosuke Kometani, ''Kenji Ishika... --Photoluminescence recovery of plasma damaged GaN by hyd... ---5th International Conference on PLAsma-Nano Technology... -206) Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki ... --Clarification of mechanisms of highly selective SiO2 et... ---5th International Conference on PLAsma-Nano Technology... -207) Yi Lu, Shang Chen, Ryosuke Kometani, ''Kenji Ishika... --Stoichiometry protection to as-etched GaN surface using... ---5th International Conference on PLAsma-Nano Technology... -208) Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, ''Kenji... --Subsequent temporal change of gaseous radical density i... ---5th International Conference on PLAsma-Nano Technology... -209) Shinpei Amasaki, Takuya Takeuchi, Keigo Takeda, ''K... --Influence of SiF4 gas addition to sidewall reaction dur... ---5th International Conference on PLAsma-Nano Technology... -210) Kohei Asano, Hiroshi Yamamoto, ''Kenji Ishikawa'', ... --Modification of Si-O-Si structures on porous-SiOCH film... ---5th International Conference on PLAsma-Nano Technology... -211) Ryosuke Kometani, Shang Chen, Yi Lu, Cao David, ''K... --Morphology on GaN exposed to plasmas at high temperature. ---5th International Conference on PLAsma-Nano Technology... -212) Atsushi Fukushima, Yusuke Abe, Keigo Takeda, Hiroki... --Relationship between silicon thin film property and flu... ---5th International Conference on PLAsma-Nano Technology... -213) Ya Lu, Atsushi Fukushima, Yusuke Abe, Y. J. Kim, Ke... --The effect of the deposition rate of microcrystalline s... ---5th International Conference on PLAsma-Nano Technology... -214) Hiroko Moriyama, ''Kenji Ishikawa'', Kazuhiro Tamiy... --ESR signals arisen from Penicillium digitatum spores. ---5th International Conference on PLAsma-Nano Technology... -215) Hiromasa Tanaka, Kae Nakamura, Sachiko Iseki, H. Ka... --Plasma-activated medium effectively killed glioma cance... ---5th International Conference on PLAsma-Nano Technology... -216) Fengdong Jia, Keigo Takeda, ''Kenji Ishikawa'', Hir... --Behaviours of reactive oxygen species generated by an A... ---5th International Conference on PLAsma-Nano Technology... -217) Noboru Ebizuka, Minoru Sasaki, W. Aoki, A. Bianco, ... --Fabrication methods for volume binary grating and novel... ---5th International Conference on PLAsma-Nano Technology... -218) Satomi Tajima, ''Kenji Ishikawa'', Toshio Hayashi, ... --Development of a Si dry chemical etching technique usin... ---5th International Conference on PLAsma-Nano Technology... -219) Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, ... --O2 and N2 addition effect for Si etching in CF4 plasma. ---5th International Conference on PLAsma-Nano Technology... -220) Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Sac... --Efficiency of ground-state atomic oxygen for inactivati... ---5th International Conference on PLAsma-Nano Technology... -221) ''Kenji Ishikawa'', Sachiko Iseki, Hiroko Moriyama,... --Electron spin resonance (ESR) observation of radicals o... ---2012 Spring Meeting of the Material Research Society, ... -222) Takehiro Hiraoka, Noboru Ebizka, Keigo Takeda, Taka... --Terahertz time-domain spectroscopic sensing of Penicill... ---2012 Spring Meeting of the Material Research Society, ... -223) Yusuke Abe, Masaru Hori, Atuschi Fukushima, Lu Ya, ... --Measurement of the flux ratio of hydrogen atom to film ... ---5th International Workshop on Plasma Spectroscopy (IPS... -224) Hiroki Kondo, T. Hagino, ''Kenji Ishikawa'', H. Kan... --Critical factors of synthesis rate and crystallinity of... ---4th International Conference on Microelectronics and P... -225) H. Shimoeda, H. Kondo, ''Kenji Ishikawa'', M. Hiram... --Edge and surface modification of nanographenes in carbo... ---4th International Conference on Microelectronics and P... -226) Makoto Sekine, Toshiya Suzuki, Keigo Takeda, Hiroki... --(PLENARY) Formation of 10-nm organic pillars by plasma ... ---The 15th Korea-Japan workshop for Advanced Plasma Proc... -227) T. Tsutsumi, M. Hori, M. Sekine, ''Kenji Ishikawa''... --High resolution temperature monitoring system of semico... ---The 15th Korea-Japan workshop for Advanced Plasma Proc... -228) Y. Kondo, Y, Miyawaki, ''Kenji Ishikawa'', T. Hayas... --Reaction mechanism of plasma etching using hydrogen-con... ---The 15th Korea-Japan workshop for Advanced Plasma Proc... -229) Hiroshi Hashizumi, Takayuki Ohta, Masafumi Ito, Fen... --Inactivation efficiencies of reactive oxygen species on... ---International Conference on Plasma Science, (Edinburgh... -230) Makoto Sekine, Takuya Takeuchi, Shinpei Amasaki, Ke... --Anaysis of photoresist surface modified by fluorocarbon... ---International Conference on Plasma Science, (Edinburgh... -231) Masaru Hori, ''Kenji Ishikawa'', Naoya Sumi, Keigo ... --Real time in situ electron spin resonance (ESR) study o... ---International Conference on Plasma Science, (Edinburgh... -232) ''Kenji Ishikawa'', Hiromasa Tanaka, Hiroko Moriyam... --Electron spin resonance (ESR) study of radicals on biol... ---International Conference on Plasma Science, (Edinburgh... -233) Masaru Hori, Hiroki Kondo, Tatsuya Hagino, ''Kenji ... --High-speed synthesis and crystalinity control of nanogr... ---XXI Europhysics Conference on Atomic and Molecular Phy... -234) M. Hori , M. Tanaka, ''Kenji Ishikawa'', H. Kondo, ... --(PLENARY) Atmospheric pressure plasma processes and the... ---The 2nd International Symposium for Plasma Biosciences... -235) T. Takeuchi, M. Sekine, ''K. Ishikawa'', H. Kondo, ... --Investigation of modification of ArF photoresist during... ---14th Annual TECHCON Conference Technology & Talent for... -236) H. Kondo, K. Yasuda, ''K. Ishikawa'', M. Sekine, M.... --Gradual transition of chemical structures at initial gr... ---The European Materials Conference European Materials R... -237) ''Kenji Ishikawa'', Hiroko Moriyama, Naoya Sumi, Ka... --(INVITED) Real-time / in-situ electron spin resonance a... ---International Univon of Materials Research Societies (... -238) Satomi Tajima, ''Kenji Ishikawa'', Toshio Hayashi, ... --Chemical dry etching of poly-Si and single crystal Si u... ---International Univon of Materials Research Societies (... -239) Ryosuke Kometani, ''Kenji Ishikawa'', Shang Chen, Y... --Surface roughness on plasma-etched gallium nitride (GaN). ---International Univon of Materials Research Societies (... -240) A. Malinowski, Makoto Sekine, Masaru Hori, ''Kenji ... --Investigation of hydrogen radical kinetics during ArF 1... ---International Univon of Materials Research Societies (... -241) Toshiya Suzuki, Keigo Takeda, ''Kenji Ishikawa'', H... --Field electron emitter fabricated by plasma etching of ... ---International Univon of Materials Research Societies (... -242) Takuya Takeuchi, Shinpei Amasaki, Makoto Sekine, Ke... --In situ XPS anaysis of ArF photoresist modification cau... ---International Univon of Materials Research Societies (... -243) Takanao Shimoeda, Hiroki Kondo, ''Kenji Ishikawa'',... --Effects of hydrogen peroxide treatment on nanostructure... ---International Univon of Materials Research Societies (... -244) T. Ohta, H. Hashizume, M. Ito, K. Takeda, ''Kenji I... --Oxidative inactivation mechanism of fungal spores emplo... ---International Univon of Materials Research Societies (... -245) H. J. Cho, Hiroki Kondo, ''Kenji Ishikawa'', Makoto... --Edge termination on electrical properties of vertically... ---2012 International Conference on Solid State Devices a... -246) Hiromasa Tanaka, Masaaki Mizuno, ''Kenji Ishikawa''... --(Award) Analysis of the intracellular molecular mechani... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1L-O05 -247) A. Fukushima, Y. Abe, Y. Lu, K. Takeda, H. Kondo, '... --Evaluation of relationship between μc-Si film property ... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2Gr-... -248) Yusuke Abe, Atsushi Fukushima, Ya Lu, Youn Joon Kim... --Spectroscopic determination of radical densities in SiH... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1-P19 -249) Takayoshi Tsutsumi, Keigo Takeda, ''Kenji Ishikawa'... --Non-contact temperature measurement of sapphire substra... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1-P26 -250) Takeyoshi Horibe, Hiroki Kondo, Hiroyuki Kano, ''Ke... --Two-step supporting of high-density metal nanoparticle ... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1-P85 -251) Lu Ya, Astushi Fukushima, Yusuke Abe, Youn J. Kim, ... --Microcrystal orientation of silicon thin film deposited... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P14 -252) Kuangda Sun, Keigo Takeda, Hiroki Kondo, Satomi Taj... --The formation of the insulating film with atmospheric p... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P17 -253) T. Komuro, K. Takeda, ''Kenji Ishikawa'', M. Sekine... --Highly selective etching of dielectrics over SiC film b... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P18 -254) Kohei Asano, Yudai Miyawaki, ''Kenji Ishikawa'', Ma... --Mechanism and control of roughness formation on ArF pho... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P19 -255) Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki ... --Studies on plasma etching of Si3N4 employing new altern... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P20 -256) Yusuke Kondo, Yudai Miyawaki, Keigo Takeda, Hiroki ... --Generation mechanism of ions and radicals in CHxFy etch... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P21 -257) Jongyun Park, Takuya Takeuchi, Jiadong Cao, ''Kenji... --Change of GaAs surface properties by irradiation of Cl2... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P23 -258) Ryosuke Kometani, Shang Chen, Yi Lu, David Cao, ''K... --Observation of plasma-exposed GaN surface at high tempe... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P24 -259) Z. Liu, S. Chen, Y. Lu, R. Kometani, ''Kenji Ishika... --Recovery of plasma-damaged GaN by employing exposure of... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P25 -260) Toshiya Suzuki, Arkadiusz Malinowski, Keigo Takeda,... --Influence of last condition in plasma reactor on gaseou... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P26 -261) Takehiro Hiraoka, Keigo Takeda, Takayuki Ohta, Nobo... --Optical properties of carbon nano walls in terahertz fr... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P45 -262) J. Cao, R. Kometani, J. Park, Y. Lu, S. Chen, ''Ken... --Research on plasma etching of gallium based compound se... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P46 -263) Youn Joon Kim, Yi Lu, Hiroki Kondo, ''Kenji Ishikaw... --Low temperature deposition and characteristics of GaN t... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P80 -264) Masaru Hori, Yusuke Abe, Atsushi Fukushima, Keigo T... --Reconsideration on effects of H radicals on thin film s... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P96 -265) Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', ... --Surface reaction of F2, NO, F, and FNO on Si during the... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P126 -266) Hiroshi Hashizume, Susumu Nagano, Takayuki Ohta, Ma... --Disinfection of fungal spores by atmospheric pressure r... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-03 -267) ''Kenji Ishikawa'', Hiroko Mizuno, Hiromasa Tanaka,... --Real-time electron spin resonance study on fungal spore... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-04 -268) Leyong Yu, Jun Kuki, Hiroki Kondo, ''Kenji Ishikawa... --Effect of nitrogen doping on photoconductivity of amorp... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-125 -269) Hironao Shimoeda, Hiroki Kondo, ''Kenji Ishikawa'',... --Effects of hydroxyl radical on nanographene surfaces in... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-129 -270) Yu Arai, Yusuke Noto, Yousuke Goto, Seiji Takahashi... --Study of the decomposition mechanism of PMMA-type polym... ---7th International Conference on Hot-Wire Chemical Vapo... -271) Akihiko Kono, Yu Arai, Yousuke Goto, Seiji Takahash... --Estimation of activation energies for decomposition rea... ---7th International Conference on Hot-Wire Chemical Vapo... -272) Keigo Takeda, Jerome Jolibois, ''Kenji Ishikawa'', ... --Measurement of activated species generated by 60 Hz exc... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -273) Takayoshi Tsutsumi, Takehiro Hiraoka, Keigo Takeda,... --Temperature measurement of substrate with a thin film u... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -274) Makoto Sekine, Toshiya Suzuki, Keigo Takeda, Hiroki... --Precise plasma process control based on combinatorial p... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -275) Hiroki Kondo, Tatusya Hagino, Keigo Takeda, ''Kenji... --Study on synthesis processes and crystallinity changes ... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -276) ''Kenji Ishikawa'', Yusuke Kondo, Yudai Miyawaki, T... --Reaction model for etching surface interacted with hydr... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -277) ''Kenji Ishikawa'', S. Chen, K. Takeda, H. Kondo, M... --(INVITED) Healing process of plasma-damaged gallium nit... ---International conference on emerging advanced nanomate... -278) J. S. Kularatne, Hiroyuki Kano, Masafumi Ito, Takay... --(title) AC励起大気圧プラズマを用いた下水モニタリング装... ---5th International Symposium of Plasma Center for Indus... -279) Hiromasa Tanaka, Masaaki Mizuno, ''Kenji Ishikawa''... --(title) プラズマ培養液による脳腫瘍細胞のアポトーシス誘導. ---5th International Symposium of Plasma Center for Indus... -280) Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Fen... --(title) ミドリカビ胞子細菌における活性酸素の定量的解析. ---5th International Symposium of Plasma Center for Indus... -281) ''Kenji Ishikawa'', Hideo Horibe, Masafumi Ito, Mak... --(INVITED) Real time in situ electron spin resonance (ES... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -282) Yusuke Kondo, Yusuke Kondo, Yudai Miyawaki, Keigo T... --Mechanism of generating ions and radicals in fluorocarb... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -283) Toshiya Suzuki, Toshiya Suzuki, A. Malinowski, Keig... --Subsequent temporal change of gaseous h and n radical d... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -284) R. Kometani, S. Chen, J. Park, J. Cao, Y. Lu, ''Ken... --Control of surface properties on plasma-etched gallium ... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -285) Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', ... --Evaluation of surface chemical bonding state and surfac... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -286) Arkadiusz Malinowski, Makoto Sekine, Masaru Hori, '... --Investigation of plasma-surface interactions between hy... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -287) Hiroki Kondo, T. Kanda, Mineo Hiramatsu, ''Kenji Is... --Crystalline and electrical properties of vertically-lam... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -288) M. Fukasawa, Yudai Miyawaki, Yusuke Kondo, Keigo Ta... --Interface trap generation by VUV/UV radiation from fluo... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -289) ''Kenji Ishikawa'', H. Mizuno, H. Tanaka, H. Hashiz... --Plasma-biological surface interaction for food hygiene:... ---The 34th International Symposium on Dry Process (DPS),... -290) S. Tajima, T. Hayashi, ''Kenji Ishikawa'', M. Sekin... --Evaluation of gas-surface reaction dynamics during the ... ---The 34th International Symposium on Dry Process (DPS),... -291) Y. Abe, A. Fukushima, Y. Lu, Y. Kim, K. Takeda, H. ... --High performances of microcrystalline Si thin film form... ---The 34th International Symposium on Dry Process (DPS),... -292) Z. Liu, S. Chen, Y. Lu, R. Kometani, ''Kenji Ishika... --An in-situ sequential H and N radical exposure process ... ---The 34th International Symposium on Dry Process (DPS),... -293) M. Fukasawa, H. Matsugai, T. Honda, Y. Miyawaki, Y.... --Photon-stimulated surface reaction and generation of da... ---The 34th International Symposium on Dry Process (DPS),... -294) T. Komuro, K. Takeda, ''Kenji Ishikawa'', M. Sekine... --Highly selective etching of gap-fill dielectrics over S... ---The 34th International Symposium on Dry Process (DPS),... -295) T. Hayashi, ''Kenji Ishikawa'', M. Sekine, M. Hori. --Quantum chemical investigations for excitation dissocia... ---The 34th International Symposium on Dry Process (DPS),... -296) K. Asano, Y. Miyawaki, ''Kenji Ishikawa'', M. Sekin... --A reduction of degradation on ArF photoresist by C5HF7 ... ---The 34th International Symposium on Dry Process (DPS),... -297) Y. Miyawaki, Y. Kondo, M. Sekine, ''Kenji Ishikawa'... --Studies on plasma etching of Si3N4 in capacitively coup... ---The 34th International Symposium on Dry Process (DPS),... -298) R. Kometani, S. Chen, M. Liu, ''Kenji Ishikawa'', H... --A high temperature plasma etching of GaN and its reacti... ---The 34th International Symposium on Dry Process (DPS),... ---- #include(MenuTab2,notitle) #include(Footer,notitle)

終了行:
#include(MenuTab1,notitle) 2012年の国際会議リスト -176) Takuya Takeuchi, Shinpei Amasaki, Keigo Takeda, Hir... --(Best poster award) Modification of ArF photoresist cau... ---The 14th International Workshop on Advanced Plasma Pro... -177) Yusuke Kondo, Yudai Miyawaki, Keigo Takeda, Hiroki ... --Mechanism of generating ions and radicals in C3F6O plas... ---The 14th International Workshop on Advanced Plasma Pro... -178) Keigo Takeda, Atsushi Fukushima, Yusuke Abe, Hiroki... --Surface loss probability of hydrogen radical on silicon... ---8th EU-Japan Joint Symposium on Plasma Processing (JSP... -179) Masaru Hori, Makoto Sekine, Hiroki Kondo, ''Kenji I... --(INVITED) Advanced plasma nano science and technology f... ---iPlasmaNano-III, (Nanyang Executive Centere, Singapore... -180) Makoto Sekine, Toshiya Suzuki, Keigo Takeda, Hiroki... --(INVITED) Formation of 10-nm organic pillars by plasma ... ---iPlasmaNano-III, (Nanyang Executive Centere, Singapore... -181) Atsushi Fukushima, Yusuke Abe, Keigo Takeda, Hiroki... --Relationship between silicon thin film property and flu... ---4th International Symposium on Advance Plasma Science ... -182) Hiroshi Hashizume, Takayuki Ohta, T. Mori, Masafumi... --Effect of atomic oxygen on inactivation of spores of P.... ---4th International Symposium on Advance Plasma Science ... -183) Shang Chen, Yi Lu, Ryosuke Kometani, ''Kenji Ishika... --The role of hydrogen radical on plasma damaged gallium ... ---4th International Symposium on Advance Plasma Science ... -184) Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, ''Kenji... --Field emission properties of 10-nm organic nanopillars ... ---4th International Symposium on Advance Plasma Science ... -185) Tatsuya Hagino, Hiroyuki Kano, ''Kenji Ishikawa'', ... --Effect of electrode materials on synthesis of nano-grap... ---4th International Symposium on Advance Plasma Science ... -186) Takehiro Hiraoka, Noboru Ebizuka, Keigo Takeda, Tak... --Terahertz time-domain spectroscopy for Penicillium digi... ---4th International Symposium on Advance Plasma Science ... -187) ''Kenji Ishikawa'', Sachiko Iseki, Hiroshi Hashizum... --Real time electron spin resonance observation of Penici... ---4th International Symposium on Advance Plasma Science ... -188) Yusuke Abe, Atsushi Fukushima, Keigo Takeda, ''Kenj... --Loss kinetics of hydrogen radicals in silane plasma. ---4th International Symposium on Advance Plasma Science ... -189) Naoya Sumi, ''Kenji Ishikawa'', Hideo Horibe, Akihi... --Analysis of surface reactions mechanism on organic mate... ---4th International Symposium on Advance Plasma Science ... -190) Masanori Kato, Keigo Takeda, ''Kenji Ishikawa'', Hi... --Three dimensional investigation of activated species in... ---4th International Symposium on Advance Plasma Science ... -191) Yusuke Kondo, Yudai Miyawaki, Keigo Takeda, Hiroki ... --Mechanism of generating ions and radicals in C3F6O plas... ---4th International Symposium on Advance Plasma Science ... -192) Ryosuke Kometani, Shang Chen, Yi Lu, Cao David, ''K... --Interactions with plasmas on gallium nitride at high te... ---4th International Symposium on Advance Plasma Science ... -193) Yi Lu, Shang Chen, Ryosuke Kometani, ''Kenji Ishika... --Depth profiles on stoichiometry of plasma-etched GaN. ---4th International Symposium on Advance Plasma Science ... -194) Tatsuya Komuro, Keigo Takeda, ''Kenji Ishikawa'', M... --Effect of DC-bias superposed to the upper electrode of ... ---4th International Symposium on Advance Plasma Science ... -195) Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki ... --Clarification of highly selective SiO2 etching process ... ---4th International Symposium on Advance Plasma Science ... -196) Kohei Asano, Hiroshi Yamamoto, Yudai Miyawaki, Keig... --Formation of smooth surface on 193 nm photoresist by C5... ---4th International Symposium on Advance Plasma Science ... -197) Takuya Takeuchi, Shinpei Amasaki, Keigo Takeda, ''K... --In situ XPS anaysis of ArF photoresist surface modified... ---4th International Symposium on Advance Plasma Science ... -198) Ya Lu, Atsushi Fukushima, Yusuke Abe, Keigo Takeda,... --Effect of hydrogen radical injection on plasma enhanced... ---4th International Symposium on Advance Plasma Science ... -199) Leoyung. Yu, Jun Kuki, Hiroki Kondo, ''Kenji Ishika... --Crystallographic analysis of amorphous carbon films syn... ---4th International Symposium on Advance Plasma Science ... -200) Jun Kuki, Leoyung Yu, Hiroki Kondo, ''Kenji Ishikaw... --Effects of RF bias on optical properties of amorphous c... ---4th International Symposium on Advance Plasma Science ... -201) Hironao Shimoeda, Hiroki Kondo, ''Kenji Ishikawa'',... --Evaluation of crystallographic properties of carbon nan... ---4th International Symposium on Advance Plasma Science ... -202) Tsuyoshi Horibe, S. Mitsuguchi, Hiroyuki Kano, Hiro... --Formation and characteristics of TiO2 nanoparticles-sup... ---4th International Symposium on Advance Plasma Science ... -203) H. Cho, Hiroki Kondo, ''Kenji Ishikawa'', Makoto Se... --Electrical properties and crystalline structures of car... ---4th International Symposium on Advance Plasma Science ... -204) Shinpei Amasaki, Takuya Takeuchi, Keigo Takeda, ''K... --Investigation of reaction mechanism at sidewall of thro... ---4th International Symposium on Advance Plasma Science ... -205) Shang Chen, Yi Lu, Ryosuke Kometani, ''Kenji Ishika... --Photoluminescence recovery of plasma damaged GaN by hyd... ---5th International Conference on PLAsma-Nano Technology... -206) Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki ... --Clarification of mechanisms of highly selective SiO2 et... ---5th International Conference on PLAsma-Nano Technology... -207) Yi Lu, Shang Chen, Ryosuke Kometani, ''Kenji Ishika... --Stoichiometry protection to as-etched GaN surface using... ---5th International Conference on PLAsma-Nano Technology... -208) Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, ''Kenji... --Subsequent temporal change of gaseous radical density i... ---5th International Conference on PLAsma-Nano Technology... -209) Shinpei Amasaki, Takuya Takeuchi, Keigo Takeda, ''K... --Influence of SiF4 gas addition to sidewall reaction dur... ---5th International Conference on PLAsma-Nano Technology... -210) Kohei Asano, Hiroshi Yamamoto, ''Kenji Ishikawa'', ... --Modification of Si-O-Si structures on porous-SiOCH film... ---5th International Conference on PLAsma-Nano Technology... -211) Ryosuke Kometani, Shang Chen, Yi Lu, Cao David, ''K... --Morphology on GaN exposed to plasmas at high temperature. ---5th International Conference on PLAsma-Nano Technology... -212) Atsushi Fukushima, Yusuke Abe, Keigo Takeda, Hiroki... --Relationship between silicon thin film property and flu... ---5th International Conference on PLAsma-Nano Technology... -213) Ya Lu, Atsushi Fukushima, Yusuke Abe, Y. J. Kim, Ke... --The effect of the deposition rate of microcrystalline s... ---5th International Conference on PLAsma-Nano Technology... -214) Hiroko Moriyama, ''Kenji Ishikawa'', Kazuhiro Tamiy... --ESR signals arisen from Penicillium digitatum spores. ---5th International Conference on PLAsma-Nano Technology... -215) Hiromasa Tanaka, Kae Nakamura, Sachiko Iseki, H. Ka... --Plasma-activated medium effectively killed glioma cance... ---5th International Conference on PLAsma-Nano Technology... -216) Fengdong Jia, Keigo Takeda, ''Kenji Ishikawa'', Hir... --Behaviours of reactive oxygen species generated by an A... ---5th International Conference on PLAsma-Nano Technology... -217) Noboru Ebizuka, Minoru Sasaki, W. Aoki, A. Bianco, ... --Fabrication methods for volume binary grating and novel... ---5th International Conference on PLAsma-Nano Technology... -218) Satomi Tajima, ''Kenji Ishikawa'', Toshio Hayashi, ... --Development of a Si dry chemical etching technique usin... ---5th International Conference on PLAsma-Nano Technology... -219) Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, ... --O2 and N2 addition effect for Si etching in CF4 plasma. ---5th International Conference on PLAsma-Nano Technology... -220) Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Sac... --Efficiency of ground-state atomic oxygen for inactivati... ---5th International Conference on PLAsma-Nano Technology... -221) ''Kenji Ishikawa'', Sachiko Iseki, Hiroko Moriyama,... --Electron spin resonance (ESR) observation of radicals o... ---2012 Spring Meeting of the Material Research Society, ... -222) Takehiro Hiraoka, Noboru Ebizka, Keigo Takeda, Taka... --Terahertz time-domain spectroscopic sensing of Penicill... ---2012 Spring Meeting of the Material Research Society, ... -223) Yusuke Abe, Masaru Hori, Atuschi Fukushima, Lu Ya, ... --Measurement of the flux ratio of hydrogen atom to film ... ---5th International Workshop on Plasma Spectroscopy (IPS... -224) Hiroki Kondo, T. Hagino, ''Kenji Ishikawa'', H. Kan... --Critical factors of synthesis rate and crystallinity of... ---4th International Conference on Microelectronics and P... -225) H. Shimoeda, H. Kondo, ''Kenji Ishikawa'', M. Hiram... --Edge and surface modification of nanographenes in carbo... ---4th International Conference on Microelectronics and P... -226) Makoto Sekine, Toshiya Suzuki, Keigo Takeda, Hiroki... --(PLENARY) Formation of 10-nm organic pillars by plasma ... ---The 15th Korea-Japan workshop for Advanced Plasma Proc... -227) T. Tsutsumi, M. Hori, M. Sekine, ''Kenji Ishikawa''... --High resolution temperature monitoring system of semico... ---The 15th Korea-Japan workshop for Advanced Plasma Proc... -228) Y. Kondo, Y, Miyawaki, ''Kenji Ishikawa'', T. Hayas... --Reaction mechanism of plasma etching using hydrogen-con... ---The 15th Korea-Japan workshop for Advanced Plasma Proc... -229) Hiroshi Hashizumi, Takayuki Ohta, Masafumi Ito, Fen... --Inactivation efficiencies of reactive oxygen species on... ---International Conference on Plasma Science, (Edinburgh... -230) Makoto Sekine, Takuya Takeuchi, Shinpei Amasaki, Ke... --Anaysis of photoresist surface modified by fluorocarbon... ---International Conference on Plasma Science, (Edinburgh... -231) Masaru Hori, ''Kenji Ishikawa'', Naoya Sumi, Keigo ... --Real time in situ electron spin resonance (ESR) study o... ---International Conference on Plasma Science, (Edinburgh... -232) ''Kenji Ishikawa'', Hiromasa Tanaka, Hiroko Moriyam... --Electron spin resonance (ESR) study of radicals on biol... ---International Conference on Plasma Science, (Edinburgh... -233) Masaru Hori, Hiroki Kondo, Tatsuya Hagino, ''Kenji ... --High-speed synthesis and crystalinity control of nanogr... ---XXI Europhysics Conference on Atomic and Molecular Phy... -234) M. Hori , M. Tanaka, ''Kenji Ishikawa'', H. Kondo, ... --(PLENARY) Atmospheric pressure plasma processes and the... ---The 2nd International Symposium for Plasma Biosciences... -235) T. Takeuchi, M. Sekine, ''K. Ishikawa'', H. Kondo, ... --Investigation of modification of ArF photoresist during... ---14th Annual TECHCON Conference Technology & Talent for... -236) H. Kondo, K. Yasuda, ''K. Ishikawa'', M. Sekine, M.... --Gradual transition of chemical structures at initial gr... ---The European Materials Conference European Materials R... -237) ''Kenji Ishikawa'', Hiroko Moriyama, Naoya Sumi, Ka... --(INVITED) Real-time / in-situ electron spin resonance a... ---International Univon of Materials Research Societies (... -238) Satomi Tajima, ''Kenji Ishikawa'', Toshio Hayashi, ... --Chemical dry etching of poly-Si and single crystal Si u... ---International Univon of Materials Research Societies (... -239) Ryosuke Kometani, ''Kenji Ishikawa'', Shang Chen, Y... --Surface roughness on plasma-etched gallium nitride (GaN). ---International Univon of Materials Research Societies (... -240) A. Malinowski, Makoto Sekine, Masaru Hori, ''Kenji ... --Investigation of hydrogen radical kinetics during ArF 1... ---International Univon of Materials Research Societies (... -241) Toshiya Suzuki, Keigo Takeda, ''Kenji Ishikawa'', H... --Field electron emitter fabricated by plasma etching of ... ---International Univon of Materials Research Societies (... -242) Takuya Takeuchi, Shinpei Amasaki, Makoto Sekine, Ke... --In situ XPS anaysis of ArF photoresist modification cau... ---International Univon of Materials Research Societies (... -243) Takanao Shimoeda, Hiroki Kondo, ''Kenji Ishikawa'',... --Effects of hydrogen peroxide treatment on nanostructure... ---International Univon of Materials Research Societies (... -244) T. Ohta, H. Hashizume, M. Ito, K. Takeda, ''Kenji I... --Oxidative inactivation mechanism of fungal spores emplo... ---International Univon of Materials Research Societies (... -245) H. J. Cho, Hiroki Kondo, ''Kenji Ishikawa'', Makoto... --Edge termination on electrical properties of vertically... ---2012 International Conference on Solid State Devices a... -246) Hiromasa Tanaka, Masaaki Mizuno, ''Kenji Ishikawa''... --(Award) Analysis of the intracellular molecular mechani... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1L-O05 -247) A. Fukushima, Y. Abe, Y. Lu, K. Takeda, H. Kondo, '... --Evaluation of relationship between μc-Si film property ... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2Gr-... -248) Yusuke Abe, Atsushi Fukushima, Ya Lu, Youn Joon Kim... --Spectroscopic determination of radical densities in SiH... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1-P19 -249) Takayoshi Tsutsumi, Keigo Takeda, ''Kenji Ishikawa'... --Non-contact temperature measurement of sapphire substra... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1-P26 -250) Takeyoshi Horibe, Hiroki Kondo, Hiroyuki Kano, ''Ke... --Two-step supporting of high-density metal nanoparticle ... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 1-P85 -251) Lu Ya, Astushi Fukushima, Yusuke Abe, Youn J. Kim, ... --Microcrystal orientation of silicon thin film deposited... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P14 -252) Kuangda Sun, Keigo Takeda, Hiroki Kondo, Satomi Taj... --The formation of the insulating film with atmospheric p... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P17 -253) T. Komuro, K. Takeda, ''Kenji Ishikawa'', M. Sekine... --Highly selective etching of dielectrics over SiC film b... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P18 -254) Kohei Asano, Yudai Miyawaki, ''Kenji Ishikawa'', Ma... --Mechanism and control of roughness formation on ArF pho... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P19 -255) Yudai Miyawaki, Yusuke Kondo, Keigo Takeda, Hiroki ... --Studies on plasma etching of Si3N4 employing new altern... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P20 -256) Yusuke Kondo, Yudai Miyawaki, Keigo Takeda, Hiroki ... --Generation mechanism of ions and radicals in CHxFy etch... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P21 -257) Jongyun Park, Takuya Takeuchi, Jiadong Cao, ''Kenji... --Change of GaAs surface properties by irradiation of Cl2... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P23 -258) Ryosuke Kometani, Shang Chen, Yi Lu, David Cao, ''K... --Observation of plasma-exposed GaN surface at high tempe... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P24 -259) Z. Liu, S. Chen, Y. Lu, R. Kometani, ''Kenji Ishika... --Recovery of plasma-damaged GaN by employing exposure of... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P25 -260) Toshiya Suzuki, Arkadiusz Malinowski, Keigo Takeda,... --Influence of last condition in plasma reactor on gaseou... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P26 -261) Takehiro Hiraoka, Keigo Takeda, Takayuki Ohta, Nobo... --Optical properties of carbon nano walls in terahertz fr... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P45 -262) J. Cao, R. Kometani, J. Park, Y. Lu, S. Chen, ''Ken... --Research on plasma etching of gallium based compound se... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P46 -263) Youn Joon Kim, Yi Lu, Hiroki Kondo, ''Kenji Ishikaw... --Low temperature deposition and characteristics of GaN t... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P80 -264) Masaru Hori, Yusuke Abe, Atsushi Fukushima, Keigo T... --Reconsideration on effects of H radicals on thin film s... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P96 -265) Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', ... --Surface reaction of F2, NO, F, and FNO on Si during the... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 2-P126 -266) Hiroshi Hashizume, Susumu Nagano, Takayuki Ohta, Ma... --Disinfection of fungal spores by atmospheric pressure r... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-03 -267) ''Kenji Ishikawa'', Hiroko Mizuno, Hiromasa Tanaka,... --Real-time electron spin resonance study on fungal spore... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-04 -268) Leyong Yu, Jun Kuki, Hiroki Kondo, ''Kenji Ishikawa... --Effect of nitrogen doping on photoconductivity of amorp... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-125 -269) Hironao Shimoeda, Hiroki Kondo, ''Kenji Ishikawa'',... --Effects of hydroxyl radical on nanographene surfaces in... ---APCPST 25th SPSM, October 2-5, 2012, Kyoto Japan, 3P-129 -270) Yu Arai, Yusuke Noto, Yousuke Goto, Seiji Takahashi... --Study of the decomposition mechanism of PMMA-type polym... ---7th International Conference on Hot-Wire Chemical Vapo... -271) Akihiko Kono, Yu Arai, Yousuke Goto, Seiji Takahash... --Estimation of activation energies for decomposition rea... ---7th International Conference on Hot-Wire Chemical Vapo... -272) Keigo Takeda, Jerome Jolibois, ''Kenji Ishikawa'', ... --Measurement of activated species generated by 60 Hz exc... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -273) Takayoshi Tsutsumi, Takehiro Hiraoka, Keigo Takeda,... --Temperature measurement of substrate with a thin film u... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -274) Makoto Sekine, Toshiya Suzuki, Keigo Takeda, Hiroki... --Precise plasma process control based on combinatorial p... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -275) Hiroki Kondo, Tatusya Hagino, Keigo Takeda, ''Kenji... --Study on synthesis processes and crystallinity changes ... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -276) ''Kenji Ishikawa'', Yusuke Kondo, Yudai Miyawaki, T... --Reaction model for etching surface interacted with hydr... ---65th Annual Gaseous Electronics Conference (GEC) Octob... -277) ''Kenji Ishikawa'', S. Chen, K. Takeda, H. Kondo, M... --(INVITED) Healing process of plasma-damaged gallium nit... ---International conference on emerging advanced nanomate... -278) J. S. Kularatne, Hiroyuki Kano, Masafumi Ito, Takay... --(title) AC励起大気圧プラズマを用いた下水モニタリング装... ---5th International Symposium of Plasma Center for Indus... -279) Hiromasa Tanaka, Masaaki Mizuno, ''Kenji Ishikawa''... --(title) プラズマ培養液による脳腫瘍細胞のアポトーシス誘導. ---5th International Symposium of Plasma Center for Indus... -280) Hiroshi Hashizume, Takayuki Ohta, Masafumi Ito, Fen... --(title) ミドリカビ胞子細菌における活性酸素の定量的解析. ---5th International Symposium of Plasma Center for Indus... -281) ''Kenji Ishikawa'', Hideo Horibe, Masafumi Ito, Mak... --(INVITED) Real time in situ electron spin resonance (ES... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -282) Yusuke Kondo, Yusuke Kondo, Yudai Miyawaki, Keigo T... --Mechanism of generating ions and radicals in fluorocarb... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -283) Toshiya Suzuki, Toshiya Suzuki, A. Malinowski, Keig... --Subsequent temporal change of gaseous h and n radical d... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -284) R. Kometani, S. Chen, J. Park, J. Cao, Y. Lu, ''Ken... --Control of surface properties on plasma-etched gallium ... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -285) Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', ... --Evaluation of surface chemical bonding state and surfac... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -286) Arkadiusz Malinowski, Makoto Sekine, Masaru Hori, '... --Investigation of plasma-surface interactions between hy... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -287) Hiroki Kondo, T. Kanda, Mineo Hiramatsu, ''Kenji Is... --Crystalline and electrical properties of vertically-lam... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -288) M. Fukasawa, Yudai Miyawaki, Yusuke Kondo, Keigo Ta... --Interface trap generation by VUV/UV radiation from fluo... ---American Vacuum Society (AVS), Tampa, Florida, USA, (O... -289) ''Kenji Ishikawa'', H. Mizuno, H. Tanaka, H. Hashiz... --Plasma-biological surface interaction for food hygiene:... ---The 34th International Symposium on Dry Process (DPS),... -290) S. Tajima, T. Hayashi, ''Kenji Ishikawa'', M. Sekin... --Evaluation of gas-surface reaction dynamics during the ... ---The 34th International Symposium on Dry Process (DPS),... -291) Y. Abe, A. Fukushima, Y. Lu, Y. Kim, K. Takeda, H. ... --High performances of microcrystalline Si thin film form... ---The 34th International Symposium on Dry Process (DPS),... -292) Z. Liu, S. Chen, Y. Lu, R. Kometani, ''Kenji Ishika... --An in-situ sequential H and N radical exposure process ... ---The 34th International Symposium on Dry Process (DPS),... -293) M. Fukasawa, H. Matsugai, T. Honda, Y. Miyawaki, Y.... --Photon-stimulated surface reaction and generation of da... ---The 34th International Symposium on Dry Process (DPS),... -294) T. Komuro, K. Takeda, ''Kenji Ishikawa'', M. Sekine... --Highly selective etching of gap-fill dielectrics over S... ---The 34th International Symposium on Dry Process (DPS),... -295) T. Hayashi, ''Kenji Ishikawa'', M. Sekine, M. Hori. --Quantum chemical investigations for excitation dissocia... ---The 34th International Symposium on Dry Process (DPS),... -296) K. Asano, Y. Miyawaki, ''Kenji Ishikawa'', M. Sekin... --A reduction of degradation on ArF photoresist by C5HF7 ... ---The 34th International Symposium on Dry Process (DPS),... -297) Y. Miyawaki, Y. Kondo, M. Sekine, ''Kenji Ishikawa'... --Studies on plasma etching of Si3N4 in capacitively coup... ---The 34th International Symposium on Dry Process (DPS),... -298) R. Kometani, S. Chen, M. Liu, ''Kenji Ishikawa'', H... --A high temperature plasma etching of GaN and its reacti... ---The 34th International Symposium on Dry Process (DPS),... ---- #include(MenuTab2,notitle) #include(Footer,notitle)

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