#author("2025-04-05T14:32:49+09:00","default:ishikawa","ishikawa") #author("2025-04-05T14:33:18+09:00","default:ishikawa","ishikawa") Kenji Ishikawa, ph. D Professor Center for low-temperature plasma sciences [[(Web):https://www.plasma.nagoya-u.ac.jp]] and Plasma nanoprocess science laboratory in the research group of future electronics creation [[(Web):https://horilab.nuee.nagoya-u.ac.jp]], Plasma nanoprocess science laboratory [[(Web):https://horilab.nuee.nagoya-u.ac.jp]] in the research group of future electronics creation, Department of Electronics [[(Web):http://www.nuee.nagoya-u.ac.jp/]], Graduate School of Engineering [[(Web):https://www.engg.nagoya-u.ac.jp/]], Nagoya University [[(Web):http://www.nagoya-u.ac.jp]] Address: Furo-cho, Chikusa, Nagoya, Aichi 464-8601 Japan phone/fax: +81-52-788-6077 e-mail: ishikawa.kenji_at_nagoya-u.jp #include(Footer,notitle)