Publication5 をテンプレートにして作成

開始行:
Back to [[Publication]] [2023] -[281] &color(white,red){OPEN Q1}; &color(white,blue){Etc... --Applied Surface Science 638, 157981 pp. 1-14 (November ... ---Taito Yoshie, ''Kenji Ishikawa'', Thi-Thuy-Nga Nguyen,... -[P15] &color(white,blue){Etch}; Selective isotropic a... --SPIE proceedings: Advanced Etch Technology and Process ... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[265] &color(black,pink){GaN}; Thermal cyclic etching... --Journal of Applied Physics 133, 043302 pp. 1-11 (Januar... ---Shohei Nakamura, Atsushi Tanide, Takahiro Kimura, Soic... [2022] -[258] &color(white,red){OPEN Q1}; &color(white,blue){Etc... --Scientific Reports 12, 20394 pp. 1-13 (November 27, 202... ---Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamu... -[257] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 61, 106006 pp. 1-6 ... ---Toshio Hayashi, ''Kenji Ishikawa'', Hiroshi Iwayama, M... -[249] &color(white,blue){Etch}; Plasma-assisted, ther... --Journal of Vacuum Science and Technology B 40, 022201 (... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... [2021] -[233] &color(white,red){Q1}; &color(white,blue){Etch}; ... --Applied Surface Science 541, 148439 pp. 1-8 (March 1, 2... ---Shih-Nan Hsiao, ''Kenji Ishikawa'', Toshio Hayashi, Ji... -[229] Reduction in photon-induced interface defects by o... --Japanese Journal of Applied Physics 60 (1), 010906 pp.1... ---Yasufumi Miyoshi, ''Kenji Ishikawa'', Makoto Sekine, M... [2020] -[216] &color(black,pink){GaN}; In situ surface analysi... --Journal of Vacuum Science and Technology A 38 (4), 0426... ---Masaki Hasegawa, Takayoshi Tsutsumi, Atsushi Tanide, S... -[213] &color(black,cyan){QC}; Electronic properties an... --Japanese Journal of Applied Physics 59 (SJ), SJJE02 pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[206] &color(white,blue){Etch}; Interaction of oxygen ... --Journal of Applied Physics 127 (2), 023303 pp. 1-9 (Jan... ---Yusuke Fukunaga, Roberto C. Longo, Peter Ventzek, Bart... [2019] -[203] &color(white,blue){Etch}; Rapid thermal-cyclic ... --Journal of Physics D: Applied Physics 52 (47), 475106 p... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[200] &color(white,blue){Etch}; Self-limiting reactio... --Journal of Vacuum Science and Technology A 37 (5), 0510... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[197] &color(white,red){Q2}; &color(white,blue){Etch}; ... --Plasma Processes and Polymers 16 (6), 1800175 pp. 1-11 ... ---Yan Zhang, ''Kenji Ishikawa'', Miran Mozetič, Makoto S... -[190] &color(black,cyan){QC}; Electronic properties a... --Japanese Journal of Applied Physics 58 (SE), SEEF01 pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[187] &color(black,pink){GaN}; Effects of BCl3 additi... --Journal of Vacuum Science and Technology B 37 (2), 0212... ---Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shoh... -[186] &color(white,red){OPEN}; Chemical bond structur... --Micro and Nano Engineering 3, pp. 1-6 (March 7, 2019) ... ---Hideshi Miyajima, Hideaki Masuda, ''Kenji Ishikawa'', ... -[181] &color(white,brown){APP}; Remotely floating wir... --Journal of Applied Physics 125 (6), 063304 pp. 1-11 (Fe... ---Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Ta... -[173] Narrow free-standing features fabricated by top... --Japanese Journal of Applied Physics 58 (2), 020906 pp. ... ---Yusuke Fukunaga, Takayoshi Tsutsumi, Hiroki Kondo, ''K... [2018] -[166] &color(black,pink){GaN}; Elevated-temperature e... --Vacuum 156, pp. 219-223 (October, 2018) [[(DOI):http... ---Takashi Kako, Zecheng Liu, ''Kenji Ishikawa'', Hiroki ... -[164] &color(black,pink){GaN}; &color(white,blue){Etch};... --Japanese Journal of Applied Physics 57 (10), 106502 pp.... --- Yan Zhang, Masato Imamura, ''Kenji Ishikawa'', Takayo... -[160] &color(white,red){OPEN}; &color(white,brown){Bio};... --Japanese Journal of Applied Physics 57 (6S2), 06JF03 pp... ---Naoto Kihara, Daiki Kuboyama, Daisuke Onoshima, ''Kenj... -[158] &color(black,pink){GaN}; Temperature dependence... --Japanese Journal of Applied Physics 57 (6S2), 06JD01 pp... ---Zecheng Liu, ''Kenji Ishikawa'', Masato Imamura, Takay... -[156] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 57 (6S2), 06JC02 pp... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[149] &color(white,brown){Bio}; &color(white,blue){FC}; ... --Japanese Journal of Applied Physics 57 (3), 037001 pp. ... ---Naoto Kihara, Hidefumi Odaka, Daiki Kuboyama, Daisuke ... -[147] &color(white,red){Q2}; &color(white,blue){FC}; &co... --Plasma Sources Science and Technology 27 (1), 015009 pp... ---Yusuke Kondo, ''Kenji Ishikawa'', Toshio Hayashi, Mako... [2017] -[141] &color(white,blue){FC}; Dependence of absolute ... --Japanese Journal of Applied Physics 56 (12), 126503 pp.... ---Yan Zhang, Takuya Takeuchi, ''Kenji Ishikawa'', Keigo ... -[139] &color(white,blue){Etch}; Surface roughening of... --Journal of Vacuum Science and Technology A 35 (6), 0606... ---Yan Zhang, Takuya Takeuchi, ''Kenji Ishikawa'', Keigo ... -[136] &color(black,pink){GaN}; Thermally enhanced for... --Japanese Journal of Applied Physics 56 (8), 096501 pp. ... ---Zecheng Liu, Atsuki Asano, Masato Imamura, ''Kenji Ish... -[P15] &color(white,blue){FC}; Thermal cyclic atomic-l... --ECS Transactions 80 (3), pp. 3-14 (August 17, 2017) ... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[134] &color(black,pink){GaN}; Reduction of chlorine ... --Applied Physics Express 10 (8), 086502 pp. 1-4 (July 24... ---Zecheng Liu, Masato Imamura, Atsuki Asano, ''Kenji Ish... -[132] &color(white,blue){FC}; Temperature dependence ... --Japanese Journal of Applied Physics 56 (7), 076202 pp. ... ---Yusuke Fukunaga, Takayoshi Tsutsumi, Keigo Takeda, Hir... -[128] &color(white,blue){FC}; Electron behaviors in a... --Japanese Journal of Applied Physics 56 (6S2), 06HC03 pp... ---Toshinari Ueyama, Yusuke Fukunaga, Takayoshi Tsutsumi,... -[126] &color(white,blue){FC}; Selective atomic-level ... --Journal of Physics D: Applied Physics 50 (19), 194001 p... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[123] &color(white,blue){FC}; Spatial profiles of int... --Journal of Physics D: Applied Physics 50 (15), 155201 p... ---Yoshinobu Ohya, ''Kenji Ishikawa'', Tatsuya Komuro, Ts... -[119] &color(black,pink){GaN}; Investigation of effec... --Japanese Journal of Applied Physics 56 (2), 026502 pp. ... ---Zecheng Liu, Jialin Pan, Atsuki Asano, ''Kenji Ishikaw... [2016] -[114] &color(white,blue){ALE}; Thermal cyclic etching... --Applied Physics Express 9 (10), 106201 pp. 1-3 (Septemb... ---Kazunori Shinoda, Masaru Izawa, Tadamitsu Kanekiyo, ''... -[107] &color(white,blue){FC}; Rapid electron density ... --Japanese Journal of Applied Physics 55 (8), 080309 pp. ... ---Yoshinobu Ohya, Manabu Iwata, ''Kenji Ishikawa'', Mako... -[106] &color(black,cyan){QC}; Primary dissociation ch... --Japanese Journal of Applied Physics 55 (7S2), 07LD07 pp... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[105] &color(white,blue){FC}; Formation of a SiOF rea... --Journal of Vacuum Science and Technology A 34 (4), 0406... ---Yoshinobu Ohya, Maju Tomura, ''Kenji Ishikawa'', Makot... [2015] -[95] &color(black,pink){GaN}; Suppression of plasma-i... --Japanese Journal of Applied Physics 54 (6S2), 06GB04 pp... ---Zecheng Liu, Jialin Pan, Takashi Kako, ''Kenji Ishikaw... -[94] &color(black,cyan){QC}; Electronic properties of... --Japanese Journal of Applied Physics 54 (6S2), 06GA03 pp... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[93] &color(white,blue){FC}; Silicon nitride (SiN) et... --Japanese Journal of Applied Physics 54 (4), 040303 pp. ... ---Yusuke Kondo, ''Kenji Ishikawa'', Toshio Hayashi, Yuda... -[92] &color(white,blue){FC}; CF3+ fragmentation by el... --Japanese Journal of Applied Physics 54 (4), 040301 pp. ... ---Yusuke Kondo, ''Kenji Ishikawa'', Toshio Hayashi, Yuda... -[87] &color(white,blue){FC}; Hydrofluorocarbon ion de... --Journal of Physics D: Applied Physics 48 (4), 045202 pp... ---Yusuke Kondo, Yudai Miyawaki, ''Kenji Ishikawa'', Tosh... [2014] -[82] &color(white,blue){HN}; Recovery of atom density... --Journal of Physics D: Applied Physics 47 (42), 422002 p... ---Toshiya Suzuki, ''Kenji Ishikawa'', Keigo Takeda, Hiro... -[80] &color(white,blue){HN}; Temporal changes of abso... --Japanese Journal of Applied Physics 53 (5), 050301 pp. ... ---Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, ''Kenji Is... [2013] -[65] Formation of nanoporous features, flat surfaces,... --Journal of Physical Chemistry C 117 (40), pp. 20810–208... ---Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', Mak... -[59] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 52 (5S2), 05EB02 (p... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[58] &color(black,pink){GaN}; A high-temperature nitr... --Applied Physics Express 6 (5), 056201 (pp. 1-4) (April ... ---Ryosuke Kometani, ''Kenji Ishikawa'', Keigo Takeda, Hi... -[56] A room temperature Si etching in NO/F2 gas chemistr... --Journal of Physical Chemistry C 117 (10), pp. 5118-5125... ---Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', Mak... -[54] &color(white,blue){FC}; Surface roughness develo... --Journal of Physics D: Applied Physics 46 (10), 102001 (... ---Takuya Takeuchi, ''Kenji Ishikawa'', Yuichi Setsuhara,... -[53] &color(white,blue){FC}; Etching-enhancement foll... --Japanese Journal of Applied Physics 52 (2), 020204 (pp.... ---Yudai Miyawaki, Emi Shibata, Yusuke Kondo, Keigo Taked... -[49] &color(white,blue){FC}; Development of the sputt... --Journal of Applied Physics 113 (1), 014306 (pp. 1-6) (J... ---Takuya Takeuchi, Carles Corbella, Simon Grosse-Kreul, ... -[48] &color(white,blue){FC}; Highly selective etching... --Japanese Journal of Applied Physics 52 (1), 016201 (pp.... ---Yudai Miyawaki, Yusuke Kondo, Makoto Sekine, ''Kenji I... [2012] -[40] &color(black,cyan){QC}; Quantum chemical investi... --Japanese Journal of Applied Physics 51 (2), 026505 (pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, Mas... -[39] &color(white,blue){FC}; Direct current (dc) supe... --Journal of Physics D: Applied Physics 45 (2), 025203 (p... ---Tsuyoshi Yamaguchi, Tetsuya Komuro, Chishio Koshimizu,... -[38] &color(black,cyan){QC}; Quantum chemical investi... --Japanese Journal of Applied Physics 51 (1), 016201 (pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, Mas... -[37] &color(white,blue){HN}; Feature profiles on plas... --Japanese Journal of Applied Physics 51 (1), 016202 (pp.... ---Hiroshi Yamamoto, Hiroki Kuroda, Masafumi Ito, Takayuk... [2011] -[36] &color(white,blue){HN}; &color(black,yellow){IR}... --Journal of Applied Physics 110 (12), 123301 (pp. 1-8) (... ---Hiroshi Yamamoto, Kohei Asano, ''Kenji Ishikawa'', Mak... -[33] &color(white,blue){FC}; &color(black,orange){Bea... --Japanese Journal of Applied Physics 50 (8S1), 08JE05 (p... ---Takuya Takeuchi, Shinpei Amasaki, Hiroki Kondo, ''Kenj... -[31] &color(white,blue){FC}; &color(black,yellow){LIF... --Japanese Journal of Applied Physics 50 (5), 056101 (pp.... ---Tsuyoshi Yamaguchi, Tetsuya Kimura, Chishio Koshimizu,... -[30] &color(white,blue){HN}; &color(black,yellow){IR}... --Journal of Applied Physics 109 (8), 084112 (pp. 1-8) (2... ---Hiroshi Yamamoto, Keigo Takeda, ''Kenji Ishikawa'', Ma... -[29] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 50 (3), 036203 (pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, Mas... [2007] -[24] &color(white,red){ESR}; &color(white,green){dia}... --Japanese Journal of Applied Physics 46, pp. 60-64 (2007... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Norikazu Mizuoch... [2006] -[23] &color(white,red){ESR}; &color(white,green){dia}... --Diamond Related Materials 15, pp. 703-706 (2006) [[(... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Norikazu Mizuoch... -[21] &color(white,red){ESR}; &color(white,green){dia}... --Physica B 376/377, pp. 327-330 (2006) [[(DOI):https:... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Seiji Samukawa, ... -[20] &color(white,blue){HN}; &color(black,yellow){IR}... --Journal of Applied Physics 99 (8), 083305 (pp. 1-6) (20... ---''Kenji Ishikawa'', Yoshikazu Yamaoka, Moritaka Nakamu... [2005] -[19] &color(white,red){ESR}; &color(white,green){dia}... --Diamond Related Materials 14, pp. 1939-1942 (2005) [... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Norikazu Mizuoch... -[18] &color(white,blue){FC}; &color(black,orange){Bea... --Journal of Applied Physics 97 (5), 053302 (pp. 1-6) (20... ---Ken-ichi Yanai, Kazuhiro Karahashi, ''Kenji Ishikawa''... -[17] &color(white,blue){FC}; &color(white,red){ESR}; ... --Applied Physics Letters 86 (26), 264104 (pp. 1-3) (2005... ---''Kenji Ishikawa'', Mitsuru Okigawa, Yasushi Ishikawa,... [2004] -[16] &color(white,blue){FC}; &color(black,orange){Beam};... --Journal of Vacuum Science and Technology A 22, pp. 1166... ---Kazuhiro Karahashi, Ken-ichi Yanai, ''Kenji Ishikawa''... [2003] -[15] &color(white,blue){FC}; &color(black,orange){Beam}... --Journal of Vacuum Science and Technology A 21, pp. L1-L... ---''Kenji Ishikawa'', Kazuhiro Karahashi, Hideo Tsuboi, ... -[14] &color(white,blue){FC}; &color(black,yellow){IR,LIF... --Journal of Applied Physics 93, pp. 1403-1408 (2003) ... ---''Kenji Ishikawa'', Shigenori Hayashi, and Makoto Sekine -[P6] Vapor treatment of copper surface using organic acids --MRS Proceedings, 766, E3.28 (2003) [[(DOI):https://d... ---''Kenji Ishikawa'', Teruo Yagishita, and Moritaka Naka... [2002] -[12] &color(white,blue){FC}; &color(black,yellow){LIF}; ... --Japanese Journal of Applied Physics 41, pp. 2207-2212 (... ---Shigenori Hayashi, ''Kenji Ishikawa'', and Makoto Sekine -[11] &color(white,red){ESR}; &color(black,yellow){IR}; ... --Applied Physics Letters 81, pp. 1773-1775 (2002) [[(... ---''Kenji Ishikawa'', Shoji Kobayashi, Mitsuru Okigawa, ... -[10] &color(white,blue){FC}; &color(black,yellow){IR}; ... --Journal of Applied Physics 91, pp. 1661-1666 (2002) ... ---''Kenji Ishikawa'', and Makoto Sekine [2001] -[9] &color(white,blue){FC}; &color(black,yellow){IR}; ... --Japanese Journal of Applied Physics 39, pp. 6990-6995 (... ---''Kenji Ishikawa'', and Makoto Sekine #include(Footer,notitle)

終了行:
Back to [[Publication]] [2023] -[281] &color(white,red){OPEN Q1}; &color(white,blue){Etc... --Applied Surface Science 638, 157981 pp. 1-14 (November ... ---Taito Yoshie, ''Kenji Ishikawa'', Thi-Thuy-Nga Nguyen,... -[P15] &color(white,blue){Etch}; Selective isotropic a... --SPIE proceedings: Advanced Etch Technology and Process ... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[265] &color(black,pink){GaN}; Thermal cyclic etching... --Journal of Applied Physics 133, 043302 pp. 1-11 (Januar... ---Shohei Nakamura, Atsushi Tanide, Takahiro Kimura, Soic... [2022] -[258] &color(white,red){OPEN Q1}; &color(white,blue){Etc... --Scientific Reports 12, 20394 pp. 1-13 (November 27, 202... ---Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamu... -[257] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 61, 106006 pp. 1-6 ... ---Toshio Hayashi, ''Kenji Ishikawa'', Hiroshi Iwayama, M... -[249] &color(white,blue){Etch}; Plasma-assisted, ther... --Journal of Vacuum Science and Technology B 40, 022201 (... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... [2021] -[233] &color(white,red){Q1}; &color(white,blue){Etch}; ... --Applied Surface Science 541, 148439 pp. 1-8 (March 1, 2... ---Shih-Nan Hsiao, ''Kenji Ishikawa'', Toshio Hayashi, Ji... -[229] Reduction in photon-induced interface defects by o... --Japanese Journal of Applied Physics 60 (1), 010906 pp.1... ---Yasufumi Miyoshi, ''Kenji Ishikawa'', Makoto Sekine, M... [2020] -[216] &color(black,pink){GaN}; In situ surface analysi... --Journal of Vacuum Science and Technology A 38 (4), 0426... ---Masaki Hasegawa, Takayoshi Tsutsumi, Atsushi Tanide, S... -[213] &color(black,cyan){QC}; Electronic properties an... --Japanese Journal of Applied Physics 59 (SJ), SJJE02 pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[206] &color(white,blue){Etch}; Interaction of oxygen ... --Journal of Applied Physics 127 (2), 023303 pp. 1-9 (Jan... ---Yusuke Fukunaga, Roberto C. Longo, Peter Ventzek, Bart... [2019] -[203] &color(white,blue){Etch}; Rapid thermal-cyclic ... --Journal of Physics D: Applied Physics 52 (47), 475106 p... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[200] &color(white,blue){Etch}; Self-limiting reactio... --Journal of Vacuum Science and Technology A 37 (5), 0510... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[197] &color(white,red){Q2}; &color(white,blue){Etch}; ... --Plasma Processes and Polymers 16 (6), 1800175 pp. 1-11 ... ---Yan Zhang, ''Kenji Ishikawa'', Miran Mozetič, Makoto S... -[190] &color(black,cyan){QC}; Electronic properties a... --Japanese Journal of Applied Physics 58 (SE), SEEF01 pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[187] &color(black,pink){GaN}; Effects of BCl3 additi... --Journal of Vacuum Science and Technology B 37 (2), 0212... ---Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shoh... -[186] &color(white,red){OPEN}; Chemical bond structur... --Micro and Nano Engineering 3, pp. 1-6 (March 7, 2019) ... ---Hideshi Miyajima, Hideaki Masuda, ''Kenji Ishikawa'', ... -[181] &color(white,brown){APP}; Remotely floating wir... --Journal of Applied Physics 125 (6), 063304 pp. 1-11 (Fe... ---Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Ta... -[173] Narrow free-standing features fabricated by top... --Japanese Journal of Applied Physics 58 (2), 020906 pp. ... ---Yusuke Fukunaga, Takayoshi Tsutsumi, Hiroki Kondo, ''K... [2018] -[166] &color(black,pink){GaN}; Elevated-temperature e... --Vacuum 156, pp. 219-223 (October, 2018) [[(DOI):http... ---Takashi Kako, Zecheng Liu, ''Kenji Ishikawa'', Hiroki ... -[164] &color(black,pink){GaN}; &color(white,blue){Etch};... --Japanese Journal of Applied Physics 57 (10), 106502 pp.... --- Yan Zhang, Masato Imamura, ''Kenji Ishikawa'', Takayo... -[160] &color(white,red){OPEN}; &color(white,brown){Bio};... --Japanese Journal of Applied Physics 57 (6S2), 06JF03 pp... ---Naoto Kihara, Daiki Kuboyama, Daisuke Onoshima, ''Kenj... -[158] &color(black,pink){GaN}; Temperature dependence... --Japanese Journal of Applied Physics 57 (6S2), 06JD01 pp... ---Zecheng Liu, ''Kenji Ishikawa'', Masato Imamura, Takay... -[156] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 57 (6S2), 06JC02 pp... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[149] &color(white,brown){Bio}; &color(white,blue){FC}; ... --Japanese Journal of Applied Physics 57 (3), 037001 pp. ... ---Naoto Kihara, Hidefumi Odaka, Daiki Kuboyama, Daisuke ... -[147] &color(white,red){Q2}; &color(white,blue){FC}; &co... --Plasma Sources Science and Technology 27 (1), 015009 pp... ---Yusuke Kondo, ''Kenji Ishikawa'', Toshio Hayashi, Mako... [2017] -[141] &color(white,blue){FC}; Dependence of absolute ... --Japanese Journal of Applied Physics 56 (12), 126503 pp.... ---Yan Zhang, Takuya Takeuchi, ''Kenji Ishikawa'', Keigo ... -[139] &color(white,blue){Etch}; Surface roughening of... --Journal of Vacuum Science and Technology A 35 (6), 0606... ---Yan Zhang, Takuya Takeuchi, ''Kenji Ishikawa'', Keigo ... -[136] &color(black,pink){GaN}; Thermally enhanced for... --Japanese Journal of Applied Physics 56 (8), 096501 pp. ... ---Zecheng Liu, Atsuki Asano, Masato Imamura, ''Kenji Ish... -[P15] &color(white,blue){FC}; Thermal cyclic atomic-l... --ECS Transactions 80 (3), pp. 3-14 (August 17, 2017) ... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[134] &color(black,pink){GaN}; Reduction of chlorine ... --Applied Physics Express 10 (8), 086502 pp. 1-4 (July 24... ---Zecheng Liu, Masato Imamura, Atsuki Asano, ''Kenji Ish... -[132] &color(white,blue){FC}; Temperature dependence ... --Japanese Journal of Applied Physics 56 (7), 076202 pp. ... ---Yusuke Fukunaga, Takayoshi Tsutsumi, Keigo Takeda, Hir... -[128] &color(white,blue){FC}; Electron behaviors in a... --Japanese Journal of Applied Physics 56 (6S2), 06HC03 pp... ---Toshinari Ueyama, Yusuke Fukunaga, Takayoshi Tsutsumi,... -[126] &color(white,blue){FC}; Selective atomic-level ... --Journal of Physics D: Applied Physics 50 (19), 194001 p... ---Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, ... -[123] &color(white,blue){FC}; Spatial profiles of int... --Journal of Physics D: Applied Physics 50 (15), 155201 p... ---Yoshinobu Ohya, ''Kenji Ishikawa'', Tatsuya Komuro, Ts... -[119] &color(black,pink){GaN}; Investigation of effec... --Japanese Journal of Applied Physics 56 (2), 026502 pp. ... ---Zecheng Liu, Jialin Pan, Atsuki Asano, ''Kenji Ishikaw... [2016] -[114] &color(white,blue){ALE}; Thermal cyclic etching... --Applied Physics Express 9 (10), 106201 pp. 1-3 (Septemb... ---Kazunori Shinoda, Masaru Izawa, Tadamitsu Kanekiyo, ''... -[107] &color(white,blue){FC}; Rapid electron density ... --Japanese Journal of Applied Physics 55 (8), 080309 pp. ... ---Yoshinobu Ohya, Manabu Iwata, ''Kenji Ishikawa'', Mako... -[106] &color(black,cyan){QC}; Primary dissociation ch... --Japanese Journal of Applied Physics 55 (7S2), 07LD07 pp... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[105] &color(white,blue){FC}; Formation of a SiOF rea... --Journal of Vacuum Science and Technology A 34 (4), 0406... ---Yoshinobu Ohya, Maju Tomura, ''Kenji Ishikawa'', Makot... [2015] -[95] &color(black,pink){GaN}; Suppression of plasma-i... --Japanese Journal of Applied Physics 54 (6S2), 06GB04 pp... ---Zecheng Liu, Jialin Pan, Takashi Kako, ''Kenji Ishikaw... -[94] &color(black,cyan){QC}; Electronic properties of... --Japanese Journal of Applied Physics 54 (6S2), 06GA03 pp... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[93] &color(white,blue){FC}; Silicon nitride (SiN) et... --Japanese Journal of Applied Physics 54 (4), 040303 pp. ... ---Yusuke Kondo, ''Kenji Ishikawa'', Toshio Hayashi, Yuda... -[92] &color(white,blue){FC}; CF3+ fragmentation by el... --Japanese Journal of Applied Physics 54 (4), 040301 pp. ... ---Yusuke Kondo, ''Kenji Ishikawa'', Toshio Hayashi, Yuda... -[87] &color(white,blue){FC}; Hydrofluorocarbon ion de... --Journal of Physics D: Applied Physics 48 (4), 045202 pp... ---Yusuke Kondo, Yudai Miyawaki, ''Kenji Ishikawa'', Tosh... [2014] -[82] &color(white,blue){HN}; Recovery of atom density... --Journal of Physics D: Applied Physics 47 (42), 422002 p... ---Toshiya Suzuki, ''Kenji Ishikawa'', Keigo Takeda, Hiro... -[80] &color(white,blue){HN}; Temporal changes of abso... --Japanese Journal of Applied Physics 53 (5), 050301 pp. ... ---Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, ''Kenji Is... [2013] -[65] Formation of nanoporous features, flat surfaces,... --Journal of Physical Chemistry C 117 (40), pp. 20810–208... ---Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', Mak... -[59] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 52 (5S2), 05EB02 (p... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, and... -[58] &color(black,pink){GaN}; A high-temperature nitr... --Applied Physics Express 6 (5), 056201 (pp. 1-4) (April ... ---Ryosuke Kometani, ''Kenji Ishikawa'', Keigo Takeda, Hi... -[56] A room temperature Si etching in NO/F2 gas chemistr... --Journal of Physical Chemistry C 117 (10), pp. 5118-5125... ---Satomi Tajima, Toshio Hayashi, ''Kenji Ishikawa'', Mak... -[54] &color(white,blue){FC}; Surface roughness develo... --Journal of Physics D: Applied Physics 46 (10), 102001 (... ---Takuya Takeuchi, ''Kenji Ishikawa'', Yuichi Setsuhara,... -[53] &color(white,blue){FC}; Etching-enhancement foll... --Japanese Journal of Applied Physics 52 (2), 020204 (pp.... ---Yudai Miyawaki, Emi Shibata, Yusuke Kondo, Keigo Taked... -[49] &color(white,blue){FC}; Development of the sputt... --Journal of Applied Physics 113 (1), 014306 (pp. 1-6) (J... ---Takuya Takeuchi, Carles Corbella, Simon Grosse-Kreul, ... -[48] &color(white,blue){FC}; Highly selective etching... --Japanese Journal of Applied Physics 52 (1), 016201 (pp.... ---Yudai Miyawaki, Yusuke Kondo, Makoto Sekine, ''Kenji I... [2012] -[40] &color(black,cyan){QC}; Quantum chemical investi... --Japanese Journal of Applied Physics 51 (2), 026505 (pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, Mas... -[39] &color(white,blue){FC}; Direct current (dc) supe... --Journal of Physics D: Applied Physics 45 (2), 025203 (p... ---Tsuyoshi Yamaguchi, Tetsuya Komuro, Chishio Koshimizu,... -[38] &color(black,cyan){QC}; Quantum chemical investi... --Japanese Journal of Applied Physics 51 (1), 016201 (pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, Mas... -[37] &color(white,blue){HN}; Feature profiles on plas... --Japanese Journal of Applied Physics 51 (1), 016202 (pp.... ---Hiroshi Yamamoto, Hiroki Kuroda, Masafumi Ito, Takayuk... [2011] -[36] &color(white,blue){HN}; &color(black,yellow){IR}... --Journal of Applied Physics 110 (12), 123301 (pp. 1-8) (... ---Hiroshi Yamamoto, Kohei Asano, ''Kenji Ishikawa'', Mak... -[33] &color(white,blue){FC}; &color(black,orange){Bea... --Japanese Journal of Applied Physics 50 (8S1), 08JE05 (p... ---Takuya Takeuchi, Shinpei Amasaki, Hiroki Kondo, ''Kenj... -[31] &color(white,blue){FC}; &color(black,yellow){LIF... --Japanese Journal of Applied Physics 50 (5), 056101 (pp.... ---Tsuyoshi Yamaguchi, Tetsuya Kimura, Chishio Koshimizu,... -[30] &color(white,blue){HN}; &color(black,yellow){IR}... --Journal of Applied Physics 109 (8), 084112 (pp. 1-8) (2... ---Hiroshi Yamamoto, Keigo Takeda, ''Kenji Ishikawa'', Ma... -[29] &color(white,blue){FC}; &color(black,cyan){QC}; ... --Japanese Journal of Applied Physics 50 (3), 036203 (pp.... ---Toshio Hayashi, ''Kenji Ishikawa'', Makoto Sekine, Mas... [2007] -[24] &color(white,red){ESR}; &color(white,green){dia}... --Japanese Journal of Applied Physics 46, pp. 60-64 (2007... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Norikazu Mizuoch... [2006] -[23] &color(white,red){ESR}; &color(white,green){dia}... --Diamond Related Materials 15, pp. 703-706 (2006) [[(... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Norikazu Mizuoch... -[21] &color(white,red){ESR}; &color(white,green){dia}... --Physica B 376/377, pp. 327-330 (2006) [[(DOI):https:... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Seiji Samukawa, ... -[20] &color(white,blue){HN}; &color(black,yellow){IR}... --Journal of Applied Physics 99 (8), 083305 (pp. 1-6) (20... ---''Kenji Ishikawa'', Yoshikazu Yamaoka, Moritaka Nakamu... [2005] -[19] &color(white,red){ESR}; &color(white,green){dia}... --Diamond Related Materials 14, pp. 1939-1942 (2005) [... ---Yuuichi Yamazaki, ''Kenji Ishikawa'', Norikazu Mizuoch... -[18] &color(white,blue){FC}; &color(black,orange){Bea... --Journal of Applied Physics 97 (5), 053302 (pp. 1-6) (20... ---Ken-ichi Yanai, Kazuhiro Karahashi, ''Kenji Ishikawa''... -[17] &color(white,blue){FC}; &color(white,red){ESR}; ... --Applied Physics Letters 86 (26), 264104 (pp. 1-3) (2005... ---''Kenji Ishikawa'', Mitsuru Okigawa, Yasushi Ishikawa,... [2004] -[16] &color(white,blue){FC}; &color(black,orange){Beam};... --Journal of Vacuum Science and Technology A 22, pp. 1166... ---Kazuhiro Karahashi, Ken-ichi Yanai, ''Kenji Ishikawa''... [2003] -[15] &color(white,blue){FC}; &color(black,orange){Beam}... --Journal of Vacuum Science and Technology A 21, pp. L1-L... ---''Kenji Ishikawa'', Kazuhiro Karahashi, Hideo Tsuboi, ... -[14] &color(white,blue){FC}; &color(black,yellow){IR,LIF... --Journal of Applied Physics 93, pp. 1403-1408 (2003) ... ---''Kenji Ishikawa'', Shigenori Hayashi, and Makoto Sekine -[P6] Vapor treatment of copper surface using organic acids --MRS Proceedings, 766, E3.28 (2003) [[(DOI):https://d... ---''Kenji Ishikawa'', Teruo Yagishita, and Moritaka Naka... [2002] -[12] &color(white,blue){FC}; &color(black,yellow){LIF}; ... --Japanese Journal of Applied Physics 41, pp. 2207-2212 (... ---Shigenori Hayashi, ''Kenji Ishikawa'', and Makoto Sekine -[11] &color(white,red){ESR}; &color(black,yellow){IR}; ... --Applied Physics Letters 81, pp. 1773-1775 (2002) [[(... ---''Kenji Ishikawa'', Shoji Kobayashi, Mitsuru Okigawa, ... -[10] &color(white,blue){FC}; &color(black,yellow){IR}; ... --Journal of Applied Physics 91, pp. 1661-1666 (2002) ... ---''Kenji Ishikawa'', and Makoto Sekine [2001] -[9] &color(white,blue){FC}; &color(black,yellow){IR}; ... --Japanese Journal of Applied Physics 39, pp. 6990-6995 (... ---''Kenji Ishikawa'', and Makoto Sekine #include(Footer,notitle)

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