#author("2022-04-03T10:04:47+09:00","default:ishikawa","ishikawa") [[Blogs]] **理研 使っている装置:water vapor plasma (Aqua Plasma Cleaner AQ-500, Samco Inc.) under the following conditions: 50 W of plasma power, 12 sccm (standard cubic centimeters per minute) of gas flow, 40 s of plasma treatment time, and 10 Pa of pressure. ↑水蒸気 [[(Web RIKEN):https://www.riken.jp/en/news_pubs/research_news/pr/2021/20211223_1/]] [[(Web Journal):https://www.science.org/doi/10.1126/sciadv.abl6228]] **産総研 松前貴司 OH終端化,表面平坦性の維持,低汚染 硫酸・過酸化水素,アンモニア・過酸化水素水で大気圧低温接合 **大阪市大 重川直輝 Surface activated bonding (須賀) Arビーム照射後,常温で荷重