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#author("2025-11-08T12:15:59+09:00","default:ishikawa","ishikawa")
#author("2025-11-08T12:24:55+09:00","default:ishikawa","ishikawa")
[[FrontPage]]

*招待講演

2025 (International: 7, Domestic: 2) Total: 110 (Intl 58)
2025 (International: 8, Domestic: 2) Total: 111 (Intl 59)

-9. Kenji Ishikawa, Keynote ''Science-based, data-driven developments in atomically scale controls of plasma processing technologies'', Microprocess and Nanotechnology Conference (MNC), (Tokyo, Novemver 2025).
-8. Kenji Ishikawa, Tutorial ''Recent advances in plasma processing for leading-edge semiconductor fabrication'', Asian European Conference on Surface Engineering (AEPSE), (Thailand, November, 2025)
-7. Kenji Ishikawa, ''Recent advances in plasma processing for leading-edge semiconductor fabrication'', Asian European Conference on Surface Engineering (AEPSE), (Thailand, November, 2025)
-6. 石川健治, (招待)'' プラズマ概論'',  第12回チップレットコンソ全体会合 (メック（尼崎），2025年11月21日)
-5. Kenji Ishikawa, ''Leading edge semiconductor plasma processing with energy-efficient, environmentally benign, evolutionary, and educational (E4) assurance'', International Thin Film Conference (TACT), (Taiwan, October, 2025)
-4. Kenji Ishikawa, ''Advancing Earth resilience through plasma-driven science: Exploring new frontiers in biochemistry and agricultural innovation'', 69th Korean Vacuum Society summer annual conference and 2025 international forum on fuctional materials, 15th international symposium on plasma bioscience (ISPB), (Korea, August 2025).
-10. Kenji Ishikawa, (Keynote) ''Science-based, data-driven developments in atomically scale controls of plasma processing technologies'', Microprocess and Nanotechnology Conference (MNC), (Tokyo, Novemver 2025).
-9. Kenji Ishikawa, (Tutorial) ''Recent advances in plasma processing for leading-edge semiconductor fabrication'', Asian European Conference on Surface Engineering (AEPSE), (Thailand, November, 2025)
-8. Kenji Ishikawa, (Invited)''Recent advances in plasma processing for leading-edge semiconductor fabrication'', Asian European Conference on Surface Engineering (AEPSE), (Thailand, November, 2025)
-7. 石川健治, (招待)'' プラズマ概論'',  第12回チップレットコンソ全体会合 (メック（尼崎），2025年11月21日)
-6. Kenji Ishikawa, (Invited)''Leading edge semiconductor plasma processing with energy-efficient, environmentally benign, evolutionary, and educational (E4) assurance'', International Thin Film Conference (TACT), (Taiwan, October, 2025)
-5. Kenji Ishikawa, (Invited)''Science-based, data-driven developments in atomically scale controls of plasma processing technologies'', iPlasmaNano-XIV (Kyushu, September 2025).
-4. Kenji Ishikawa, (Invited)''Advancing Earth resilience through plasma-driven science: Exploring new frontiers in biochemistry and agricultural innovation'', 69th Korean Vacuum Society summer annual conference and 2025 international forum on fuctional materials, 15th international symposium on plasma bioscience (ISPB), (Korea, August 2025).
-3. Kenji Ishikawa, Hirokazu Hara, Shinichi Kondo, Masafumi Ito, Hiromasa Tanaka, and Kenichi Inoue (Invited) ''Plasma-driven sciences: Dynamics and transports of biochemically reactive species'', 5th INTERNATIONAL WORKSHOP ON PLASMA AGRICULTURE (IWOPA4), Philadelphia, USA. (June 2025), Wednesday 11:00-11:30
-2. Kenji Ishikawa (Invited), ''Energy-efficient, Environmental, Evolutional, and Educational E4 assurance for new advanced semiconductor etching technologies based on low-temperature plasma science'', International Thin-Film Transistor Conference (ITC 2025), (Nara Park Bus Terminal, Nara, Japan) (March, 2025)
-1. 石川健治, (招待)''低温プラズマ先進半導体エッチングにおける革新技術の創出'',  ２０２４年度第4回先端半導体パッケージWG研究会 (大阪大学，2025年2月14日)

2024 (International: 3, Domestic: 1) Total: 101 (Intl 49)

-4. 石川健治, (招待)''接着から拡がるプラズマ技術～半導体、バイオ、医療，農業への応用～'', 2024年度 接着講座マスターコース (名古屋産業技術研究所，2024年11月21日)
-3. Kenji Ishikawa (Plenary) ''Plasma-Driven Sciences: Exploring Complex Interactions at Plasma Boundaries'', 17th International Conference on Plasma Science and Applications (ICPSA2024), Kuala Lumpur, Malaysia (November 2024)
-2. Kenji Ishikawa (Invited) ''Low temperature plasma life innovations'', On-Line Low Temperature Plasma Seminar (OLTP), (February 2024)
-1. Kenji Ishikawa (Invited) ''Low temperature plasma agricultural innovations'', The 70th Anniversary of Friendship Between Japan and Cambodia Commemorative Symposium “Next-generation Circular Bio Economy Symposium”at Royal University of Agriculture, Cambodia. (February 2024)

2023 (International: 5, Domestic: 4) Total: 97 (Intl 46)

-9. Kenji Ishikawa, (Invited) ''Plasma etching technology: Next milestone of assurance energy and environment'', Advanced Metallization Conference 2023 32nd Asian Session (October 2023).
-8. 石川健治,(招待) ''低温プラズマのバイオ応用〜プラズマ照射効果〜(Bioapplications of low temperature plasma and effects of plasma irradiation on liquids and living organisms)'', 第66回放射線化学討論会 名古屋大学, (September 2023)
-7. Kenji Ishikawa, (Invited) ''Low temperature plasma life innovations: Functional reaction networks of radical chemistry'', IAEA  Technical Meeting on Emerging Applications of Plasma Science and Technology on Vienna International Centre (VIC) (September 2023)
-6. 石川健治, (招待)''水田での低温プラズマ処理が収獲にもたらす効果(Plasma treatments in rice paddy fields: Impacts on yield and quality)'', 第40回日本植物バイオテクノロジー学会大会 千葉大学 (September 2023)
-5. Kenji Ishikawa, (KEYNOTE) ''Frontiers of Plasma Etching Technology for Advanced Semiconductor Devices".'', 35th International Conference on Phenomena in Ionized Gases (ICPIG), Egmond aan Zee, the Netherlands (July 2023)
-4. Kenji Ishikawa, Hiroshi Hashizume, Hidemi Kitano, Hiromasa Tanaka, and Masaru Hori, (Invited) ''Plasma Treatments in Rice Paddy Fields: Impacts on Yield and Quality'', 4TH INTERNATIONAL WORKSHOP ON PLASMA AGRICULTURE (IWOPA4), (June 2023), D0002
-3. 石川健治, (招待) ''低温プラズマって何？～道具として使えるプラズマ生成と作用の原理とは～'', ぎふプラズマ産業創出ワーキンググループ　令和４年度勉強会 (岐阜大学サテライトキャンバス（岐阜県），2023年3月）
-2. Kenji Ishikawa, Hiromasa Tanaka, Hirokazu Hara, Shin-ichi Kondo, Masafumi Ito, Kazunori Koga, Masaharu Shiratani, and Masaru Hori (KEYNOTE) ''Plasma-driven science for emerging plasma-processing technologies'', ISPlasma2023 / IC-PLANTS2023, Gifu, Japan, 2023/3/9. 09aA08K
-1. 石川健治, (招待) ''原子層エッチング反応の設計と制御'', 第５回 Atomic Layer Process (ALP) Workshop (大坂大学, February 2023)

2022 (International: 5, Domestic: 1) Total: 88 (Intl 41)

-6. Kenji Ishikawa, Hiromasa Tanaka, Camelia Miron, Takashi Kondo, Masaru Hori, Shinya Toyokuni, Kae Nakamura, Hiroaki Kajiyama, and Masaaki Mizuno. (Invited) ''Non-thermal plasma-activated lactated solution altered metabolisms in cancer cells'', International Conference on Plasma Science and Applications (ICPSA), (December 2022).
-5. Kenji Ishikawa, (Invited) ''Nanoscale dry processes for controlling atomic layer reactions and fabrication of high-aspect-ratio features'', 30th anniversary Korea International Semiconductor Conference on Manufacturing Technology (KISM 2022), (Busan, Korea, November 2022).
-4. Kenji Ishikawa, (Invited) ''Plasma-functional nitrogen effects on biological, medical, and agricultural applications'', 75th Gaseous Electric Conference (GEC), (Sendai, October 2022).
-3. Kenji Ishikawa, (Invited) ''Nanoscale etching technologies for nitrides and carbides'', IEEE NTC (Nanotechnology Council) Technical Committee TC17 (Online seminar, May 2023)
-2. Kenji Ishikawa (Invited tutorial lecturer)''Plasma medicine and plasma bio related phenomena'', 2022 MRS Spring Meeting & Exhibit (MRS Spring) (Hawaii, USA, May 2023)
-1. 石川健治 ''Development of control at nanometer scale in etching technology for fabrication of high-aspect ratio features'', 日本表面真空学会スパッタリングおよびプラズマプロセス技術部会（SP部会）第170回定例研究会, (February 2022).

2021 (International: 4, Domestic: 9) Total: 82 (Intl 36)

-13. Kenji Ishikawa (Invited) ''Plasma-biological reaction networks and aqueous radical chemistry'', 31st Material Research Society in Japan (MRS-J), Yokohama, Japan (December 12-15, 2021)
-12. Kenji Ishikawa (Keynote) ''Functional nitrogen science for plasma-processing in life and matter'', Material Research Meeting (MRM 2020), Yokohama, Japan (December 12-17, 2021)  
-11. 石川健治 (Invited tutorial) ''広がるプラズマ材料科学：半導体からバイオまで'', MRM forum, Yokohama, Japan (December 12, 2021)
-10. 石川健治 (Invited) ''どうするプラズマ～これからの半導体プロセス～'', 第２回サタデーモーニングプラズマ講座, Online (November 13, 2021)
-9. 石川健治 (Invited) ''プラズマが衝く～半導体プロセス４０年～'', 第１回サタデーモーニングプラズマ講座, Online (October 9, 2021)
-8. Kenji Ishikawa (Plenary) ''Toward plasma cancer therapy and intracellular metabolic modifications by treatments using low-temperature plasma-activated solutions'', 30th International Toki Conference on Plasma and Fusion Research, Online (November 15-18, 2021)
-7. Kenji Ishikawa (Invited tutorial) ''Leading edge plasma etching technologies'', Advanced Metallization Conference 2021: 30th Asian Session, Online (October, 2021)
-6. Kenji Ishikawa (Invited) ''Low-temperature plasma-activated solutions and metabolic modification'', 5th Asia Pacific Conference on Plasma Physics, Division of Plasma Physics, Association of Asia-Pacific Physical Societies (AAPPS-DPP2021), Online (September 2021), AB-PL3
-5. 石川健治 (Invited) ''プラズマのチカラ　いま・これから'', 名古屋大学プラズマ研究60年記念シンポジウム, Online (September, 2021)
-4. 石川健治 (Invited) ''原子層エッチングの反応素過程とその設計、制御'', 第81回応用物理学会秋季学術講演会, オンライン (September 2021)
-3. 石川健治 (Invited) ''プラズマプロセスの原理'', 講演会，オンライン (August, 2021)
-2. 石川健治 (Invited) ''Latest trends of dry etching technologies'', 講演会，オンライン (June, 2021)
-1. 石川健治 (Invited) ''低温プラズマを道具として使いこなす為には ～プラズマの生成とプラズマの表面作用の原理～'', 公益社団法人 日本技術士会 中部本部 春季講演会　低温プラズマって何？  (March 2021)

2020 (International: 2, Domestic: 3) Total: 69 (Intl 32)
-5. Kenji Ishikawa (Invited) ''Germination kinetics of plasma-activated seeds'', 4th Asian Pacific Conference on Plasma Physics (AAPPS-DPP 2020) (October 2020)
-4. 石川健治 (Invited) ''プラズマプロセスにおける気中・液中のラジカル・イオン計測技術'', プラズマ材料科学第153委員会 第146回研究会, Online (September 2020)
-3. Kenji Ishikawa (Invited) ''Toward the low-temperature plasma cancer therapy'', Satellite meeting of AAPPS-DPP2020, Online (August 2020)
-2. Kenji Ishikawa (Invited) ''Diagnostics and therapy of cancer using plasma technology'', International Symposium on Medical and Radiation Physics (ISMARP-2020), Online (July 2020)
-1. 石川健治 (Invited) ''非平衡プラズマによる機能性窒素の生成と応用'', 第３３回プラズマ新領域研究会, 東京大学 (February, 2020)

2019 (International: 2, Domestic: 9) Total: 64 (Intl 30)
-11. 石川健治 (Invited) ''非平衡バイオエレクトロニクス ～プラズマの生体作用とは～'', プラズマバイオセミナ , 九州大学 (December 2019)
-10. Kenji Ishikawa (Invited) ''Physics and chemistry in low-temperature plasma bio-applications'', 7th East Asia Joint Symposium on Plasma and Electrostatics Technologies for Environmental Applications (EAPETEA-7), Okinawa (November, 2019)
-9. 石川健治 (Invited) 第35回 九州･山口プラズマ研究会, 対馬 (November, 2019)
-8. 石川健治 (Invited) ''プラズマ制御「前駆体」が拓く生命科学と材料科学'', 第79回応用物理学会秋季学術講演会, 北海道 (September 2019)
-7. 石川健治 (Invited) ''低温プラズマの大気圧下での発生・発生源から生体への活性種輸送'', 第72回日本酸化 ストレス学会学術集会, 北海道 (June, 2019)
-6. 石川健治 (Invited) ''低温プラズマ研究紹介'', 第一回将来ビジョン・戦略会議 低温プラズマ科学研究センター将来ビジョン戦略委員会  (May, 2019)
-5. 石川健治 (Invited) ''プラズマの基礎と各種応用技術'', 講習会 (May 2019).
-4. 石川健治 (Invited) ''低温プラズマ・歴史と未来予想図'', 第４０回　先端プラズマ技術研究会（金三会）, (March, 2019)
-3. 石川健治 (Invited) ''大気圧プラズマと表面の相互作用'', 日本真空学会スパッタリングおよびプラズマプロセス技術部会 第159回定例研究会 (March 2019)
-2. Kenji Ishikawa (Invited) ''Low temperature plasma surface interactions among multiple phases'', 5th Asian Workshop on Applied Plasma Science and Engineering (AJC-APSE), Malaysia, (January 2019)
-1. 石川健治 (Invited) ''プラズマによる液中活性種の生成'', 東北大学電気通信研究所共同プロジェクト研究会, (January 2019)

2018 (International: 2, Domestic: 5) Total: 53 (Intl 28)
-7. 石川健治 (Invited) ''プラズマが誘起する細胞内の生体応答と生化学反応'', プラズマ・核融合学会　第35回年会 大阪大学 (December 2018)
-6. 石川健治 (Invited) ''プラズマが誘起する液中化学反応診断の最前線'', 平成30年度電気学会北陸支部シンポジウム, 金沢大学 (November, 2018)
-5. 石川健治 (Invited) ''バイオ応用のための大気圧プラズマの多様性'', プラズマバイオコンソーシアム ワークショップ（第1回）, 九州大学 (September, 2018)
-4. Kenji Ishikawa (Invited) ''Low temperature plasma surface interactions for their future basic researches and applications'', 22nd International Conference on Gas Discharges and Their Applications (GD) (September, 2018)
-3. 石川健治 (Invited) ''プラズマが拓く未来社会'', オープンキャンパス　学科紹介, (August, 2018)
-2. Kenji Ishikawa (Invited) , 7th International Conference on Plasma Medicine (ICPM7), Philadelphia, USA (June, 2018).
-1. 石川健治 (Invited) ''プラズマ医療応用への挑戦~細胞を生かすプラズマ治療に向けて~'', 自然科学研究機構シンポジウム, (March, 2018)

2017 (International: 3, Domestic: 6) Total: 46 (Intl 26)
-9. Kenji Ishikawa (Invited) ''Dynamics of Intracellular Responses in HeLa Cells Cultured in Non‐equilibrium Atmospheric Pressure‐Plasma‐treated Medium (PAM)'', 10th APSPT (December 2017)
-8. 石川健治 (Invited) ''医療・バイオ応用プラズマ医農工連携研究と教育'', 東海工学教育協会地区大会, 名古屋大学 (December 2017)
-7. 石川健治 (Invited) ''Challenges of Plasma Medicine for Future Health and Longevity Society'', 3rd Plasma Conference (PLASMA 2017), Himeji (November, 2017).
-6. 石川健治 (Invited) ''GaNデバイス材料のエッチング''（ストイキオメトリーの精密制御）, 平成29年度実践セミナー 『エッチング実践セミナー』, (September, 2017)
-5. Kenji Ishikawa (Invited) ''Diagnostics of activated species generated by non-equilibrium atmospheric pressure plasmas for plasma biomedical applications'', Frontiers in Low Temperature Plasma Diagnostics Workshop (FRONTIERS 2017), Zlatibor, Serbia (April, 2017)
-4. 石川健治 (Invited) ''医療・バイオ応用プラズマ技術'', 電子情報技術部会　エレクトロニクス交流会エレクトロニクス応用技術講演会「プラズマエレクトロニクスの新展開」 (March, 2017)
-3. Kenji Ishikawa (Invited) ''Plasma technology for medicine and bio application'', Workshop on advanced plasma applications on bio and nanomaterials, Nagoya University, (January, 2017)
-2. 石川健治 (Invited) 金三会 (January 2017)
-1. 石川健治 (Invited) 北陸プラズマ医療研究会 (January 2017)

2016 (International: 5, Domestic: 2) Total: 37 (Intl 23)
-7. Kenji Ishikawa, (Invited) MRS-J.　(Yokohama, December 2016)
-6. 石川健治 (Invited) サイエンスの扉 (Nagoya, December 2016)
-5. 石川健治 (Invited) プラ核 (Sendai, December 2016)
-4. Kenji Ishikawa, (Invited) NU-SKKU Joint Symposium on neuroscience (Suwon, Korea, November 2016)
-3. Kenji Ishikawa, (Invited) GRDC (Seoul, Korea November 2016)
-2. Kenji Ishikawa, (Invited) ''Diagnostics of activated species generated by non-equilibrium atmospheric pressure plasmas for plasma biomedical applications''. 7th Intern Workshop on Plasma Spectroscopy (IPS 2016), (Inuyama, Japan, Jun 26-29, 2016)
-1. Kenji Ishikawa, (Invited) ''Bond scission and cross-linking during exposure of atomic hydrogen to poly (methyl methacrylate)'', EMN Meeting on Biomaterials 2016 (Phucket, Thailand, Apr. 4-6, 2016).

2015 (International: 1, Domestic: 4) Total: 30 (Intl 17)
-5. 石川健治 (Invited)  プラズマエレクトロニクス 講習会 (Tokyo, November 2015)
-4. 石川健治 (Invited)  金三会 (Nagoya, 2015)
-3. Kenji Ishikawa, (Invited) ''Plasma-surface interaction analyzed by vibrational sum-frequency generation (SFG)''. 7th ISPlasma/8th IC-PLANTS (Nagoya, Japan, Mar. 26-31, 2015).
-2. 石川健治 (Invited)  名大オープンレクチャー (Nagoya)
-1. Kenji Ishikawa, (Invited)  COST workshop (Spain, February 2015)

2014 (International: 7, Domestic: 3) Total: 25 (Intl 16)
-10. Kenji Ishikawa, (Invited) ''Plasma-Biological Surface Interaction for Food Hygiene''. E-MRS and MRS-J Joint Symposium, Frontier of Nano-Materials Bed on Advanced Plasma Technologies, (Yokohama, Japan. Dec. 10-12, 2014)
-9. 石川健治 (Invited) ''プラズマ照射液相の実験的解析'', プラズマカンファレンス (Niigata, Japan, November 19, 2014).
-8. Kenji Ishikawa, (Invited) ''Diagnostics of plasma-surface interactions in plasma processes'', 67th Gaseous Electronics Conference (GEC), (Raleigh NC, USA, Nov. 3‐7 2014).
-7. 石川健治 (Invited) ''プラズマ誘起バイオマテリアルの表面反応とプラズマ医療への展開'', 応物秋 バイオナノセッション (Hokkaido, Japan, September 18, 2014). 
-6. Kenji Ishikawa, (Invited) ''In-liquid plasma synthesis of graphene for catalyst supports''. International Symposium on Plasmas for Catalysts and Energy Materials (ISPCEM-2014) (Tianjin, China, Sep. 13-16, 2014).
-5. 石川健治 (Invited) ''水素ラジカルのポリマー表面反応の実時間・その場電子スピン共鳴(ESR)解析'', 11th Cat-CVD (Sendai, Japan, July 14, 2014)
-4. Kenji Ishikawa, (Invited) ''Electron Spin Resonance Study of Plasma-Liquid Medium Interactions''. International Workshop on Diagnostics and Modelling for Plasma Medicine (DMPM2014) (Nara, Japan, May 23-24, 2014).
-3. Kenji Ishikawa, (Invited) ''Diagnostics of SiH4/H2 Plasma and Surface Reaction in Microcrystalline Silicon Deposition''. The 41st International Conference On Metallurgical Coatings & Thin Films (ICMTCF), (San Diego, USA, May 2, 2014).
-2. Kenji Ishikawa, (Invited) ''Ultra high density atmospheric pressure plasma source''. The International Symposium on Plasma-Nano Materials and Processes (Seoul, South Korea, Apr. 2-5, 2014).
-1. Kenji Ishikawa, (Invited) ''Plasma Induced Surface Roughness of Polymeric Materials''. 18th KJ Workshop and 2014 Japan-Korea Joint Symposium on Advanced Solar Cells, (Fukuoka, Japan, February 6-7, 2014).

2013 (International: 2, Domestic: 1) Total: 15 (Intl 9)
-3. 石川健治 (Invited) ''プラズマ－表面相互作用の実時間その場電子スピン共鳴分光研究'', 応物プラズマエレクトロニクス 賞受賞講演 (Kyoto, September 17, 2013).
-2. Kenji Ishikawa, (Invited) ''In-situ ESR measurements for plasma materials interactions''. The 9th Asian-European International Conference on Plasma Surface Engineering, (Jeju, Korea, Aug. 2013).
-1. Kenji Ishikawa, (Plenary) ''Plasma-surface interactions in plasma etching of future device fabrication''. The 16th International Workshop on Advanced Plasma Processing and Diagnostics, (Okazaki, Japan, Jan. 25 - 27, 2013).

2012 (International: 3, Domestic: 0) Total: 12 (Intl 7)
-3. Kenji Ishikawa, (Invited) ''Real time In Situ Electron Spin Resonance (ESR) Study of Free Radicals on Materials Created by Plasmas''. American Vacuum Society (AVS), (Tampa, Florida, USA, Oct. 28-Nov. 2, 2012).
-2. Kenji Ishikawa, (Invited) ''Healing Process of Plasma‐Damaged Gallium Nitride (GaN)''. International conference on emerging advanced nanomaterials (ICEAN), (Brisbane, Australia, Oct. 22- 25, 2012).
-1. Kenji Ishikawa, (Invited) ''Real-time / In-situ Electron Spin Resonance Analysis of Surface Reactions on Organic / Biological Materials Interacted with Plasmas''. International Union of Materials Research Societies (IUMRS), International Conference on Electronic Materials (ICEM), (Yokohama, Japan, Sep. 23-28, 2012).

2011 (International: 2, Domestic: 3) Total: 9 (Intl 4)
-5. 石川健治 (Invited) ''電子スピン共鳴測定によるプラズマ表面相互作用のその場観察'', プラズマカンファレンス2011, プラズマ・核融合学会第28回年会/応用物理学会第29回プラズマプロセシング研究会/日本物理学会(領域2)2011年秋季大会 (Kanazawa, November 22-25, 2011).
-4. Kenji Ishikawa, (Invited) ''In situ ESR Measurements for Revealing Plasma-Surface Interactions''. Asian-European International Conference on Plasma Surface Engineering (AEPSE), (Dalian, China, Sep. 19-22, 2011).
-3. 石川健治 (Keynote) ''Electron-Spin Resonance (ESR) Analysis of Plasma-Surface Interaction'', The 24th Symposium on Plasma Science for Materials (SPSM-24) (Osaka, Japan, July 19-20, 2011).
-2. Kenji Ishikawa, (Invited) ''Real-time Electron-Spin-Resonance Study of Plasma-Surface interaction''. 13th International Workshop on Advanced Plasma Processing and Diagnostics (Daejeon, Korea, July 21-22, 2011).
-1. 石川健治 (Invited) ''半導体プラズマプロセス中の表面反応機構の解析'', 第133回シリコンテクノロジー研究集会 (Tokyo, Japan, February 18, 2011).

2010 (International: 2, Domestic: 2) Total: 4 (Intl 2)
-4. 石川健治 (Invited) ''半導体プラズマプロセス中の表面反応機構の解析'', 第10回インテリジェントナノプロセス (Sendai, Japan, Dec. 22, 2010).
-3. Kenji Ishikawa, (Invited) ''In line Electron Spin Resonance Study of Plasma-Surface Interaction for plasma etching''. 20th MRS-Japan Academic Symposium, Session A: Frontier of Nano-Materials Based on Advanced Plasma Technologies, (Yokohama, Japan, December 20-21, 2010).
-2. 石川健治 (Invited) ''ESR インライン計測による材料エッチング過程の観察'', 応物秋シンポジウム招待講演  (Nagasaki, Japan, Sept. 14-17, 2010).
-1. Kenji Ishikawa, (Invited) ''Nanoscale engineering for plasma etching of future device fabrication''. 10th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop, (Nagasaki, Japan, Jan. 8-10, 2010).

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