ProceedingIntern24
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Proceedings of international conferences
*2024
* ISPlasma on March, 2024
* AVS 24th International Conference on Atomic Layer Depos...
-A new challenge for developing novel atomic layer etchin...
--Thi-Thuy-Nga Nguyen, Y. Yamaguchi, K. Shinoda, K. Sun, ...
---ALE1-TuM-6 at 9:15 am-9:30 am August 6, 2024
-Isotropic atomic layer etching of titanium carbide using...
--Kazunori Shinoda, T. Nguyen, Y. Kozuma, K. Yokogawa, M....
---ALE-SuP-18 6:00 pm-8:00 pm August 4, 2024
* ICPM at Slovenia, on September 2024
* 77th Annual Gaseous Electronics Conference (GEC) at San...
-Process Control of Plasma Etching of SiN, SiO2 and poly-...
--Trung Nguyen Tran, Toshio Hayashi, Hiroshi Iwayama, Sh...
---ET2.00004 11:00 AM–11:15 AM October 1, 2024
-In Situ Electron Spin Resonance and Spin Trapping Study ...
--Kenichi Inoue, Takashi Kondo, ''Kenji Ishikawa'', and M...
---GR2.00002 10:30 AM–10:45 AM October 3, 2024
-Identification of autophagy inducers on cancer cell trea...
--Taishi Yamakawa, Kae Nakamura, Masaaki Mizuno, Shinya T...
---HW6.00038 4:00 pm-6:00 pm October 2, 2024
other
-Revisiting optical actinometry to utilize multiple argon...
Michael Mo, Shih-Nan Hsiao, Fatima Jenina T Arellano, Mak...
---ET1.00004 8:45 AM–9:00 AM October 1, 2024
* AVS at Tampa, Florida, USA on October, 2024
-Advanced semiconductor plasma processes pioneered by und...
--Masaru Hori, M. Sekine, T. Tsutsumi, K. Ishikawa
---INVITED: PS1-MoA-1 1:30 pm-2:00 pm November 4, 2024
other
-The role of PF3 on etching characteristics of SiO2 and S...
--Shih-Nan Hsiao, M. Sekine, Y. Iijima, R. Suda, M. Yokoi...
---PS2-TuM-15 11:30 am-11:45 am November 5, 2024
* International symposium on dry process (DPS2024) at Hok...
-Hydrofluoroethane plasmas with CHF2CF3, CF3CH3, and CHF2...
--Tran Trung Nguyen, Toshio Hayashi, Hiroshi Iwayama, and...
-Etching of GaN using Ar/F2 plasma at high temperatures
--J. He, Shohei Nakamura, Atsushi Tanide, Trung Nguyen Tr...
-Study on Selective Dry Etching of Epitaxially Grown Si0....
--K. Ozaki, N. Takada, Yusuke Imai, Takayoshi Tsutsumi, K...
-UV laser ionization desorption of surfaces for GaN etching
--Ryo Takahashi, Ryusei Sakai, Takayoshi Tsutsumi, and Ke...
-Surface sulfurization of amorphous carbon films in the c...
--Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Yuta Aoki, Hiroyas...
-Plasma-enhanced atomic layer deposition of carbon films
--Liugang Hu, Takayoshi Tsutsumi, Nobuyoshi Kobayashi, Ke...
other
-Cryogenic plasma etching of SiN films with HF-contained ...
--Shih-Nan Hsiao, Makoto Sekine, Yuki Iijima, Yoshihide K...
-Cryogenic plasma etching of SiO2 and Si using PF3/H2 pre...
--Chih-Yu Ma, Shih-Nan Hsiao, Yusuke Imai, Makoto Sekine,...
-CF4 plasma etching-induced defects at SiO2/Si interface
--S. Nunomura, T. Tsutsumi, N. Takada, M. Fukasawa, and M...
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Proceedings of international conferences
*2024
* ISPlasma on March, 2024
* AVS 24th International Conference on Atomic Layer Depos...
-A new challenge for developing novel atomic layer etchin...
--Thi-Thuy-Nga Nguyen, Y. Yamaguchi, K. Shinoda, K. Sun, ...
---ALE1-TuM-6 at 9:15 am-9:30 am August 6, 2024
-Isotropic atomic layer etching of titanium carbide using...
--Kazunori Shinoda, T. Nguyen, Y. Kozuma, K. Yokogawa, M....
---ALE-SuP-18 6:00 pm-8:00 pm August 4, 2024
* ICPM at Slovenia, on September 2024
* 77th Annual Gaseous Electronics Conference (GEC) at San...
-Process Control of Plasma Etching of SiN, SiO2 and poly-...
--Trung Nguyen Tran, Toshio Hayashi, Hiroshi Iwayama, Sh...
---ET2.00004 11:00 AM–11:15 AM October 1, 2024
-In Situ Electron Spin Resonance and Spin Trapping Study ...
--Kenichi Inoue, Takashi Kondo, ''Kenji Ishikawa'', and M...
---GR2.00002 10:30 AM–10:45 AM October 3, 2024
-Identification of autophagy inducers on cancer cell trea...
--Taishi Yamakawa, Kae Nakamura, Masaaki Mizuno, Shinya T...
---HW6.00038 4:00 pm-6:00 pm October 2, 2024
other
-Revisiting optical actinometry to utilize multiple argon...
Michael Mo, Shih-Nan Hsiao, Fatima Jenina T Arellano, Mak...
---ET1.00004 8:45 AM–9:00 AM October 1, 2024
* AVS at Tampa, Florida, USA on October, 2024
-Advanced semiconductor plasma processes pioneered by und...
--Masaru Hori, M. Sekine, T. Tsutsumi, K. Ishikawa
---INVITED: PS1-MoA-1 1:30 pm-2:00 pm November 4, 2024
other
-The role of PF3 on etching characteristics of SiO2 and S...
--Shih-Nan Hsiao, M. Sekine, Y. Iijima, R. Suda, M. Yokoi...
---PS2-TuM-15 11:30 am-11:45 am November 5, 2024
* International symposium on dry process (DPS2024) at Hok...
-Hydrofluoroethane plasmas with CHF2CF3, CF3CH3, and CHF2...
--Tran Trung Nguyen, Toshio Hayashi, Hiroshi Iwayama, and...
-Etching of GaN using Ar/F2 plasma at high temperatures
--J. He, Shohei Nakamura, Atsushi Tanide, Trung Nguyen Tr...
-Study on Selective Dry Etching of Epitaxially Grown Si0....
--K. Ozaki, N. Takada, Yusuke Imai, Takayoshi Tsutsumi, K...
-UV laser ionization desorption of surfaces for GaN etching
--Ryo Takahashi, Ryusei Sakai, Takayoshi Tsutsumi, and Ke...
-Surface sulfurization of amorphous carbon films in the c...
--Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Yuta Aoki, Hiroyas...
-Plasma-enhanced atomic layer deposition of carbon films
--Liugang Hu, Takayoshi Tsutsumi, Nobuyoshi Kobayashi, Ke...
other
-Cryogenic plasma etching of SiN films with HF-contained ...
--Shih-Nan Hsiao, Makoto Sekine, Yuki Iijima, Yoshihide K...
-Cryogenic plasma etching of SiO2 and Si using PF3/H2 pre...
--Chih-Yu Ma, Shih-Nan Hsiao, Yusuke Imai, Makoto Sekine,...
-CF4 plasma etching-induced defects at SiO2/Si interface
--S. Nunomura, T. Tsutsumi, N. Takada, M. Fukasawa, and M...
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