Committee members for IC-PLANTS 2013

• Organizing Committee
• Executive Committee
• Program Committee
• Advisory Committee

Organizing Committee

Chair	N. Ohno Nagoya University, Japan
Co-Chair	M. Shiratani Kyushu University, Japan
Member	H. Amano Meijo University, Japan Y. Baba Nagoya University, Japan T. Egawa Nagoya Institute of Technology, Japan N. Fujiwara Mitsubishi Electric Corp., Japan B. Gnade University of Texas at Dallas, USA M. Goto Nagoya University, Japan J. G. Han Shungkyunkwan University, Korea S. Hamaguchi Osaka University, Japan S. Higashi Hiroshima University, Japan M. Hori Nagoya University, Japan S. Hosaka Tokyo Electron Limited, Japan Y. Ikehara AIST (National Institute of Advanced Industrial Science and Technology), Japan S. Ikezawa Chubu University, Japan H. Ikuta Nagoya University, Japan O. Joubert National Center for Scientific Research, France K. Koumoto Nagoya University, Japan T. Matsumura Nagoya University, Japan S. Miyazaki Nagoya University, Japan A. Mizuno Toyohashi University of Technology, Japan T. Mizutani Nagoya University, Japan M. Nagatsu Shizuoka University, Japan T. Ohiwa Toshiba Corporation, Japan K. Ono Kyoto University, Japan K. Sasaki Hokkaido University, Japan Y. Setsuhara Osaka University, Japan T. Shirafuji Osaka City University, Japan Y. Suzuoki Nagoya University, Japan T. Tanji Nagoya University, Japan Y. Terashima The University of Tokyo, Japan H. Toyoda Nagoya University, Japan N. Umehara Nagoya University, Japan S. Zaima Nagoya University, Japan

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Executive Committee

Chair	T. Ishijima Kanazawa University, Japan
Vice-Chair	S. Kajita Nagoya University, Japan
Member	M. Aramaki Nagoya University, Japan N. Ebizuka Nagoya University, Japan T. Hayashi Nagoya University, Japan K. Ishikawa Nagoya University, Japan H. Kondo Nagoya University, Japan H. Kousaka Nagoya University, Japan K. Makihara Nagoya University, Japan H. Mizuno Nagoya University, Japan T. Ohta Meijo University, Japan S. Tajima Nagoya University, Japan K. Takeda Nagoya University, Japan H. Tanaka Nagoya University, Japan T. Ueno Nagoya University, Japan

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Program Committee

Chair	M. Sasaki Toyota Technological Institute, Japan
Vice-Chair	M. Sekine Nagoya University, Japan
Member	J. H. Boo Sungkyunkwan University, Korea U. Cvelbar Jozef Stefan Institute, Slovenia R.A.H. Engeln Eindhoven University of Technology, The Netherlands P. Favia University of Bari, Italy D. Graves University of California, Berkeley, USA M. Goeckner University of Texas at Dallas, USA N. Hayashi Kyushu University, Japan M. Hiramatsu Meijo University, Japan T. Hirata Tokyo City University, Japan Y. Huang Tsinghua University, China T. Ichiki The University of Tokyo, Japan M. Ito Meijo University, Japan M. Izawa Hitachi High-Technologies, Japan T. Kaneko Tohoku University, Japan K. Karahashi Osaka University, Japan H. Kobayashi Hitachi, Ltd., Japan K. Koga Kyushu University, Japan N. Koshizaki AIST(National Institute of Advanced Industrial Science and Technology), Japan K. Kurihara Toshiba Corporation, Japan H. Kurita Toyohashi University of Technology, Japan K. Nakamura Chubu University, Japan N. Nishizawa Nagoya University, Japan T. Nozaki Tokyo Institute of Technology, Japan G. Oehrlein University of Maryland, USA A. Ogino Shizuoka University, Japan T. Okumura Panasonic Corporation, Japan K. Ostrikov CSIRO Materials Science and Engineering and The University of Sydney, Australia L. Overzet University of Texas at Dallas, USA J. Röpcke Institute of Low Temperature Plasma Physics, Germany N. Saito Nagoya University, Japan M. Sakakita AIST(National Institute of Advanced Industrial Science and Technology), Japan I. Sawada Tokyo Electron Limited, Japan Y. Suda Toyohashi University of Technology, Japan Y. Tanaka Kanazawa University, Japan T. Tatsumi SONY Corporation, Japan F. Tochikubo Tokyo Metropolitan University, Japan A. Wakahara Toyohashi University of Technology, Japan T. Watanabe Tokyo Institute of Technology, Japan

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Advisory Committee

Member	T. Goto Chubu University, Japan R. Hatakeyama Tohoku University, Japan Y. Horiike University of Tsukuba, Japan M. Kondo AIST (National Institute of Advanced Industrial Science and Technology), Japan T. Makabe Keio University, Japan H. Sugai Chubu University, Japan O. Takai Kanto Gakuin University, Japan

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