Theme

• Fundamentals of plasma processes
• Plasma technology and MEMS
• Atmospheric pressure plasma and Plasma biotechnology
• Interactions between plasmas and nano-interfaces

Topics

• Nano-fabrication
• Diagnostics and monitoring of plasmas and Reaction surfaces
• Nano-electronics
• Nano-biology
• Interdisciplinary or integrated research with Plasma technologies
• Nano-optics
• MEMS & NEMS technologies
• Process technologies for flat panel display
• Environmental technologies
• Equipment technologies
• Emerging new concept