Reviews1 のバックアップ(No.1)

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  • 1 (2020-11-20 (金) 22:19:19)
  • 2 (2021-11-12 (金) 23:23:54)
  • 3 (2023-02-18 (土) 14:20:20)
  • 4 (2023-12-20 (水) 15:55:06)
  • 5 (2023-12-20 (水) 20:22:28)

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This is a list of review articles

[2020]

• [209] Electron spin resonance as a tool to monitor the influence of novel processing technologies on food properties
  • Trends in Food Science and Technology 100, pp. 77-87 (April 17, 2020) DOI
    • Francisco J. Barba, Shahin Roohinejad, Kenji Ishikawa, Sze Ying Leong, Alaa El-Din A Bekhit, Jorge A. Saraiva, and Nikolai Lebovka

[2019]

• [202] Review of methods for the mitigation of plasma-induced damage to low-dielectric-constant interlayer dielectrics used for semiconductor logic device interconnects
  • Plasma Processes and Polymers 16 (9), 1900039 (pp. 1-20) (September 5, 2019). DOI
    • Hideshi Miyajima, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

• [195] Free Progress and perspectives in dry processes for leading-edge manufacturing of devices: Toward intelligent processes and virtual product development
  • Japanese Journal of Applied Physics 58 (SE), SE0804 (pp. 1-21) (May 30, 2019) DOI

• [194] Free Progress and perspectives in dry processes for emerging multidisciplinary applications: How can we improve our use of dry processes?
  • Japanese Journal of Applied Physics 58 (SE), SE0803 (pp. 1-17) (May 30, 2019) DOI

• [193] Free Progress and perspectives in dry processes for nanoscale feature fabrication: Fine pattern transfer and high-aspect-ratio feature formation
  • Japanese Journal of Applied Physics 58 (SE), SE0802 (pp. 1-24) (May 30, 2019) DOI

• [192] Free Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: A physics and chemistry perspective
  • Japanese Journal of Applied Physics 58 (SE), SE0801 (pp. 1-14) (May 30, 2019) DOI

[2018]

• [161] Free Etch Progress in nanoscale dry processes for fabrication of high-aspect-ratio features: How can we control critical dimension uniformity at the bottom?
  • Japanese Journal of Applied Physics 57 (6S2), 06JA01(May 25, 2018). DOI
    • Kenji Ishikawa, Kazuhiro Karahashi, Tatsuo Ishijima, Sung Il Cho, Simon Elliott, Dennis Hausmann, Dan Mocuta, Aaron Wilson, and Keizo Kinoshita

[2017]

• [J5] Free 最先端プラズマバイオ技術
  • Japanese Society of Radiation Chemistry 104, 3-14 (October 31, 2017) 放射線化学 (in Japanese) web
    • Masaru Hori, Kenji Ishikawa, Takashi Kondo, Hiromasa Tanaka, and Hiroshi Hashizume

• [133] PM State of the art in medical applications using non-thermal atmospheric pressure plasma
  • Reviews on Modern Plasma Physics 1, 3 (July 3, 2017). DOI
    • Hiromasa Tanaka, Kenji Ishikawa, Masaaki Mizuno, Shinya Toyokuni, Hiroaki Kajiyama, Fumitaka Kikkawa, Hans-Robert Metelmann, and Masaru Hori

• [J4] Free ESR PM 電子スピン共鳴法を活用したプラズマバイオ反応プロセスの診断
  • プラズマ核融合学会誌 2017年5月号　小特集「気相－液相反応プロセスにおける診断技術の進展」 PDF
    • 石川健治，近藤隆，竹田圭吾，呉準席，橋爪博司，田中宏昌，近藤博基，太田貴之，伊藤昌文，関根誠，堀勝

• [130] Etch Progress and prospects in nanoscale dry processes - How can we control atomic layer reactions?
  • Japanese Journal of Applied Physics 56 (6S2), 06HA02 (June 1, 2017). Progress Review of DPS special issue. DOI
    • Kenji Ishikawa, Kazuhiro Karahashi, Takanori Ichiki, Jane P. Chang, Steven M. George, W. M. M. Kessels, Hae June Lee, Stefen Tinck, Jung Hwan Um, and Keizo Kinoshita

[2014]

• [P11] ESR PA Diagnostics of plasma-biological surface interactions in low pressure and atmospheric pressure plasmas
  • International Journal of Modern Physics: Conference Series 32, 1460318 (August 15, 2014). DOI, link to World Scientific Publishing Co.
    • Kenji Ishikawa, and Masaru Hori