Committee members for IC-PLANTS

Organizing Committee

Chair	Y. Suzuoki Nagoya University, Japan
Vice Chair	M. Hori Nagoya University, Japan
Member	Y. Baba Nagoya University, Japan G. Bruce University of Texas at Dallas, U.S.A. U. Czarnetzki Ruhr-University Bochum, Germany T. Goto Chubu University, Japan J. G. Han Shungkyunkwan University, Korea R. Hatakeyama Tohoku University, Japan M. Hirose MIRAI Project, Japan Y. Horiike National Institute for Material Science, Japan S. Hosaka Tokyo Electron Limited, Japan O. Joubert National Center for Scientific Research, France K. Koumoto Nagoya University, Japan A. Kono Nagoya University, Japan T. Makabe Keio University, Japan T. Mizutani Nagoya University, Japan M. Nagatsu Shizuoka University, Japan T. Ohiwa Toshiba Corporation, Japan K. Ono Kyoto University, Japan H. Sugai Chubu University, Japan O. Takai Nagoya University, Japan T. Tanji Nagoya University, Japan N. Umehara Nagoya University, Japan S. Zaima Nagoya University, Japan

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Executive Committee

Chair	K. Sasaki Nagoya University, Japan
Member	M. Aramaki Nagoya University, Japan T. Ishijima Nagoya University, Japan H. Kousaka Nagoya University, Japan N. Ohno Nagoya University, Japan

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Program Committee

Chair

M. Sekine Nagoya University, Japan

Member

J. H. Boo Sungkyunkwan University, Korea R. Engeln Eindhoven University of Technology, Netherlands P. Favia University of Bari, Itary N. Fujiwara Renesas Technology Corporation, Japan S. Hamaguchi　 Osaka University, Japan T. Hayashi Nagoya University, Japan M. Hiramatsu Meijyo University, Japan T. Ichiki The University of Tokyo, Japan M. Izawa Hitachi Limited, Japan M. Kondo AIST(National Institute of Advanced Industrial Science and Technology), Japan S. Miyazaki Hiroshima University, Japan K. Nakamura Chubu University, Japan G. Oehrlein University of Maryland, U.S.A. L. Overzet University of Texas at Dallas, U.S.A. J. Röpcke Institute of Low Temperature Plasma Physics, Garmany N. Saito Nagoya University, Japan I. Sawada Tokyo Electron Ltd., Japan Y. Setsuhara Osaka University, Japan M. Shiratani Kyushu University, Japan H. Toyoda Nagoya University, Japan T. Watanabe Tokyo Institute of Technology, Japan

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