Program

Thursday, March 13, 2008

10:00-10:20

Opening

Yasuo Suzuoki
Nagoya University, Japan

10:20-11:00

Plenary

"Laser Thomson scattering diagnostics of low-temperature plasmas"

Akihiro Kono
Nagoya University, Japan

11:00-11:40

"On surface modification of nano-particles and kinetics in molecular plasmas"

Volker Brüser and Jüergen Röpcke
INP Greifswald, Germany

11:40-12:20

"Growth of Carbon Nanotubes by Plasma-Enhanced CVD and its Application to the Field Effect Transistors".

Takashi Mizutani
Nagoya University, Japan

12:20-13:40

Lunch

13:40-14:20

"Low Loss Long Range Surface Plasma Polariton Waveguides and their Applications"

Yidong Huang
Tsinghua University, China

14:20-15:00

"A New Trend for Fabrication of Nanomaterials by Laser Irradiation in Liquid"

Naoto Koshizaki
AIST, Japan

15:00-15:40

"Gate Stack Patterning: Challenges of the Future"

Olivier Joubert
CNRS, France

15:40-16:00

Coffee break

16:00-16:40

"Nanodevice for Single Biomolecular and Single Cellular Research"

Yoshinobu Baba
Nagoya University, Japan

16:40-18:00

Special Session

’FLUCTUATION’ The last issue in Nanotechnology; Emerging mechanism and Solutions

16:40-17:00  /  Masaru Izawa
Hitachi Ltd., Japan

17:00-17:20  /  Tetsuya Tatsumi
Sony Corporation, Japan

17:20-17:40  /  Toyohiro Chikyo
NIMS, Japan

17:40-18:00  /  Discussion
 

18:30-20:00

Banquet (Restaurant "Hananoki" in Nagoya Univ.)


Friday, March 14, 2008

9:00-9:40

"Stochastic Heating in Capacitive Discharges and the PSR Effect"

Uwe Czarnetzki
Ruhr-University Bochum, Germany

9:40-10:20

"Diagnostic Tools for Technological Plasmas"

Richard Engeln
Eindhoven U. of Technology, Netherlands

10:20-10:40

Coffee break

10:40-11:20

"Plasma-Surface Interactions for Advanced Gate Etch Process"

Koichi Ono
Kyoto University, Japan

11:20-12:00

"Low Temperature Synthesis of Oxides Film Synthesis on Polymer by Magnetron Sputtering "

Jeon G. Han
SungKyunKwan University, Korea

12:00-13:00

Lunch

13:00-14:30

Poster session

14:30-15:10

"Exotic Plasmas for Nano Technology & Science - Cryo Plasma & Supercritical Fluid Plasma - "

Kazuo Terashima
The University of Tokyo, Japan

15:10-15:50

"Low Temperature Material Processing Using Microwave Plasma Technology"

Masaaki Nagatsu
Shizuoka University, Japan

15:50-16:30

"Plasma Engineering for Third Generation Nanotechnology"

Masaharu Shiratani
Kyusyu University, Japan

16:30-16:40

Closing

Masaru Hori
Nagoya University, Japan


Banquet

Invited Speakers from abroad

  • Uwe Czarnetzki Ruhr-University Bochum, Germany
  • R. Engeln Eindhoven University of Technology, Netherlands
  • Jeon G. Han SungKyunKwan University, Korea
  • Yidong Huang TsinghuaUniversity, China
  • Olivier Joubert CNRS, France
  • Volker Brüser INP Greifswald, Germany