TTN

Memorandum

1. Manipulation of etch selectivity of silicon nitride over silicon dioxide to a-carbon by controlling substate temperature with a CF4/H2 plasma
   • Hsiao, SN (Hsiao, Shih-Nan); Britun, N (Britun, Nikolay); Nguyen, TTN (Nguyen, Thi-Thuy-Nga); Tsutsumi, T (Tsutsumi, Takayoshi); Ishikawa, K (Ishikawa, Kenji); Sekine, M (Sekine, Makoto); Hori, M (Hori, Masaru)
     • Vacuum 210, 111863 (2023) DOI: 10.1016/j.vacuum.2023.111863
2. Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma
   • Nguyen, TTN (Nguyen, Thi-Thuy-Nga); Shinoda, K (Shinoda, Kazunori); Hamamura, H (Hamamura, Hirotaka); Maeda, K (Maeda, Kenji); Yokogawa, K (Yokogawa, Kenetsu); Izawa, M (Izawa, Masaru); Ishikawa, K (Ishikawa, Kenji); Hori, M (Hori, Masaru)
     • Scientific Reports 12 (1) 20394 (2022) DOI: 10.1038/s41598-022-24949-1
3. Low-temperature reduction of SnO2 by floating wire-assisted medium-pressure H-2/Ar plasma
   • Nguyen, TTN (Thi-Thuy-Nga Nguyen); Sasaki, M (Sasaki, Minoru); Hsiao, SN (Hsiao, Shih-Nan); Tsutsumi, T (Tsutsumi, Takayoshi); Ishikawa, K (Ishikawa, Kenji); Hori, M (Hori, Masaru)
     • Plasma Process Polymer 19 (6) e2100209 (2022) DOI: 10.1002/ppap.202100209
4. On the Etching Mechanism of Highly Hydrogenated SiN Films by CF4/D-2 Plasma: Comparison with CF4/H-2
   • Hsiao, SN (Hsiao, Shih-Nan); Nguyen, TTN (Nguyen, Thi-Thuy-Nga); Tsutsumi, T (Tsutsumi, Takayoshi); Ishikawa, K (Ishikawa, Kenji); Sekine, M (Sekine, Makoto); Hori, M (Hori, Masaru)
     • Coating 11 (12) 1535 (2021) DOI: 10.3390/coatings11121535
5. Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H-2 plasma at different substrate temperatures
   • Hsiao, SN (Hsiao, Shih-Nan); Britun, N (Britun, Nikolay); Nguyen, TTN (Thi-Thuy-Nga Nguyen); Tsutsumi, T (Tsutsumi, Takayoshi); Ishikawa, K (Ishikawa, Kenji); Sekine, M (Sekine, Makoto); Hori, M (Hori, Masaru)
     • Plasma Process Polymer 18 (11) 2100078 (2021) DOI: 10.1002/ppap.202100078
6. Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H-2/Ar plasma at atmospheric pressure
   • Nguyen, TTN (Thi-Thuy-Nga Nguyen); Sasaki, M (Sasaki, Minoru); Tsutsumi, T (Tsutsumi, Takayoshi); Ishikawa, K (Ishikawa, Kenji); Hori, M (Hori, Masaru)
     • Scientific Reports 10 (1) 17770 (2021) DOI: 10.1038/s41598-020-74663-z
7. Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass
   • Nguyen, TTN (Thi-Thuy-Nga Nguyen); Sasaki, M (Sasaki, Minoru); Odaka, H (Odaka, Hidefumi); Tsutsumi, T (Tsutsumi, Takayoshi); Ishikawa, K (Ishikawa, Kenji); Hori, M (Hori, Masaru)
     • Journal of Applied Physics 125 (6) 063304 (2019) DOI: 10.1063/1.5081875
8. Microstructure, near infrared reflectance, and surface temperature of Ti-O coated polyethylene terephthalate fabrics prepared by roll-to-roll high power impulse magnetron sputtering system
   • Nguyen, T (Thi-Thuy-Nga Nguyen); Chen, YH (Chen, Ying-Hung); Chen, ZM (Chen, Zih-Min); Cheng, KB (Cheng, Kuo-Bing); He, JL (He, Ju-Liang)
     • Thin Solid Films 663, pp.1-8 (2019) DOI: 10.1016/j.tsf.2018.08.003
9. Multifunctional Ti-O coatings on polyethylene terephthalate fabric produced by using roll-to-roll high power impulse magnetron sputtering system
   • Nguyen, TTN (Thi-Thuy-Nga Nguyen); Chen, YH (Chen, Ying-Hung); Chen, MY (Chen, Min-Yi); Cheng, KB (Cheng, Kuo-Bing); He, JL (He, Ju-Liang)
     • Surface Coating Technology 324 , pp.249-256 (2017) DOI: 10.1016/j.surfcoat.2017.05.082
10. Preparation of titanium monoxide nanopowder by low-energy wet ball-milling
    • Nguyen, TTN and He, JL
      • ADVANCED POWDER TECHNOLOGY 27 (4) , pp.1868-1873 (2016)
11. One-step inkjet printing of tungsten oxide-poly(3,4-ethylenedioxythiophene):polystyrene sulphonate hybrid film and its applications in electrochromic devices
    • Nguyen, TTN; Chan, CY and He, JL
      • Thin Solid Films 603 , pp.276-282 (2016)
12. Preparation of inkjet-printed titanium monoxide as p-type absorber layer for photovoltaic purposes
    • Nguyen, TTN; Chen, YH and He, JL
      • Thin Solid Films 572 , pp.8-14 (2014)

Last-modified: 2023-06-09 (金) 18:11:23

Link: Memorandum