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Meeting Scene
Thursday, March 10, to Saturday, March 12, 2011
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| Banquet on March 10
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| Opening remarks Hirotaka Toyoda Nagoya University, Japan  |
| Global Model of Micro Hollow Cathode Discharges in Argon P. Chabert CNRS-Ecole Polytechnique, France 
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| Plasma Propagation of a 13.56 MHz Asymmetric Surface Barrier
Discharge in Atmospheric Pressure Air R.W. Boswell The Australian National University, Australia 
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| Weakly Magnetized Inductively Coupled Plasma Source for 450 mm Wafer Processing Tool H.-J. Lee Pusan National University, Korea 
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| Optimal Aspect Ratio for Multi-hollow Microwave Discharge I.P. Ganachev Shibaura Mechatronics Corporation, Japan 
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| High Speed Surface Modification with AC Excited Ultra High Density Non-Equilibrium Atmospheric Pressure Plasma M. Hori Nagoya University, Japan 
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| Applications of MIR-Laser Absorption Techniques for Plasma Diagnostics in Basic Research and Industry J. Röpcke INP Greifswald, Germany 
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| Application of Remote Hydrogen Plasma to Selective Processing for Ge-based Devices – Crystallization, Etching and Metallization S. Miyazaki Nagoya University, Japan 
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| RF Waveform Tailoring to Control Film Morphology during Nanocrystalline Silicon PECVD J-P Booth Laboratoire de Physique des Plasmas-CNRS, Ecole Polytechnique, France 
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| Ultra Low Resistive NM Thick AZO Films Deposited by Magnetron Sputtering Using Solid Phase Crystallization M. Shiratani Kyushu University, Japan 
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| Light-Weighted Micromirror Fabricated Using Stacked Photoresist Masks Realized by UV Curing S. Kumagai Toyota Technological Institute, Japan 
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| Benchmark Calculations of Atomic Data for Plasma Applications K. Bartschat Drake University, USA 
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| New Phenomenology in Description of Townsend Discharges and Gas Breakdown: from Standard Size to Micro discharges Z. Lj. Petrovic University of Belgrade, Serbia 
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| Surface Roughness Formation during Si Etching in Cl2 and Cl2/O2 Plasmas: Atomic-scale Analysis of Three-dimensional Feature Profile Evolution H. Tsuda Kyoto University, Japan 
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| Synthesis of Nano-graphene by Plasma in Liquid Ethanol T. Hagino Nagoya University, Japan 
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| Plasma Treatment of Living Tissues — How Penetrating are the Plasma-mediated Therapeutic Effects M.G. Kong Loughborough University, UK 
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| Other Scene
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