March 10 | Banquet | March 11 | March 12 | Excursion
Plasma processing technologies are the state of the art technologies leading the way through ultra-high performance in Nano-materials, microelectronic devices, flat panels, etc.. IC-PLANTS is organized for offer an opportunity for discussions and exchange of recent progress of Plasma Science and Nanotechnology among the Plasma CoEs in the world. It is absolutely necessary to collaborate between the research communities for clearing the complex issues in the interdisciplinary research fields. The 4th IC-PLANTS is to be held at the Takayama Public Cultural Hall, Takayama JAPAN. The Organizing Committee invites you to the conference and welcomes the submission of your papers.
Organizing Committee Chairr
Hirotaka Toyoda
Professor, Nagoya Universityy
Banquet (pdf) on March 10
Excursion (pdf) on March 12
- Co-Sponsored by
- Supported by
- Tokai division of the Japan Society of Applied Physics
- Tokai Branch of The Institute of Electrical Engineers of Japan
- Plasma Electronics Division, the Japan Society of Applied Physics
- Plasma Center for Industrial Applications, Nagoya Urban Industrial Promotion Corporation
- The Surface Science Society of Japan
- Japan Vacuum Industry Association