Scope

DPS 2011 will be held at Kyoto, Japan, on November 11-12, 2011.
Please visit to http://www.dps2011.kuaero.kyoto-u.ac.jp

DPS Archives from 1979 to 2010: visit to http://www.plasma.engg.nagoya-u.ac.jp/dps

Plasma Process for Green Technology

The 32nd International Symposium on Dry Process will be held at Ookayama campus of Tokyo Institute of Technology (Tokyo Tech) on November 11-12, 2010. Dry Processes are the of the art technologies leading the way through ultra-high performance in microelectoronic devices. The DPS has provided for 31 years a valuable forum of discussion on science and technology of new developments in this field.