DPS 2011 will be held at Kyoto, Japan, on November 11-12, 2011.
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DPS Archives from 1979 to 2010: visit to

Plasma Process for Green Technology

The 32nd International Symposium on Dry Process will be held at Ookayama campus of Tokyo Institute of Technology (Tokyo Tech) on November 11-12, 2010. Dry Processes are the of the art technologies leading the way through ultra-high performance in microelectoronic devices. The DPS has provided for 31 years a valuable forum of discussion on science and technology of new developments in this field.