Information | Theme/Topics
Topics of the Symposium
- 1. Plasma-Surface Reactions
- 2. Conductor & Si Etching
- 3. Dielectric Etching
- 4. Plasma-induced Damage
- 5. Plasma Diagnostics
- 6. Modeling and Simulation
- 7. Plasma Equipment
- 8. Monitoring Systems
- 9. CVD / PVD / ALD
- 10. Plasma processes for
- 3D Devices, FPD, LED, LASER,
- Organic Devices, Bio-Application,
- Medicine, MEMS,
- Nanotechnologies and Environmental Technology
- 11. Atmospheric pressure plasma
- 12. Liquid Plasma
- 13. New Dry Process Concepts
- 14. Wet Process and Reactions